Semiconductor memory device, method of manufacturing the same and method of driving the same

A semiconductor memory device comprising:

• a one conductivity type semiconductor substrate on which a plurality of stripe-shaped convex portions each having a pair of opposing side surfaces are provided at a distance in a column direction;
• a pair of opposite conductivity type source/drain regions formed on a surface of the semiconductor substrate on both sides of the stripe-shaped convex portions;
• first insulating films for covering upper surfaces of the stripe-shaped convex portions;
• second insulating films for covering the side surfaces of respective stripe-shaped convex portions and the source/drain regions;
• plural pairs of floating gates opposed to the side surfaces of the stripe-shaped convex portions and the source/drain regions via the second insulating films and arranged at a distance along the side surfaces of the stripe-shaped convex portions;
• third insulating films formed on the floating gates;
• and
• a plurality of control gates opposed to the upper surfaces of the stripe-shaped convex portions via the first insulating films and opposed to the plural pairs of the floating gates via the third insulating films, and provided at a distance in a row direction;
• wherein semiconductor memory elements are formed at intersecting regions of the control gates and the stripe-shaped convex portions.

A semiconductor memory device manufacturing method comprising the steps of:

• forming a convex portion having a pair of opposing side surfaces by etching selectively a semiconductor substrate based on a mask on the semiconductor substrate;
• introducing based on the mask an opposite conductivity type impurity into a surface area of the semiconductor substrate on both sides of the convex portion such that opposite conductivity type source/drain regions are formed on both sides of the convex portion respectively to put the convex portion therebetween;
• forming an insulating film on upper surface and both side surfaces of the convex portion and surfaces of the source/drain regions;
• forming a first conductive film on an overall surface;
• forming a pair of floating gates that oppose to side surfaces of the convex portion and the source/drain regions via the insulating film by anisotropic-etching the first conductive film;
• forming insulating films on surfaces of the floating gates;
• forming a second conductive film on an overall surface;
• and
• forming control gate, which oppose to upper surface of the convex portion via the insulating film on the upper surface of the convex portion and also oppose to the floating gates via the insulating films on the surfaces of the floating gates, by patterning the second conductive film.

A semiconductor memory device manufacturing method of manufacturing a semiconductor memory device in which a plurality of semiconductor memory elements are arranged in rows and columns on a semiconductor substrate,

• the method comprising the steps of:
• (i) forming a plurality of stripe-shaped pattern layers each containing an oxidation resistant film in a column direction at a distance on one conductivity type semiconductor substrate;
• (ii) forming a plurality of stripe-shaped convex portions each having a pair of opposing side surfaces, by etching the semiconductor substrate exposed from both sides of the stripe-shaped pattern layers;
• (iii) forming opposite conductivity type source/drain regions on a surface layer of the semiconductor substrate on both sides of the stripe-shaped convex portions by ion implantation;
• (iv) exposing oxidation resistant films of the stripe-shaped pattern layers;
• (v) forming a new oxidation resistant film on an overall surface;
• (vi) forming a sidewall insulating film made of the new oxidation resistant film on two side surfaces of the stripe-shaped convex portions by anisotropic-etching the new oxidation resistant film respectively;
• (vii) forming thick insulating films on the source/drain regions between sidewall insulating films by selectively oxidizing surfaces of the source/drain regions using the sidewall insulating films and the oxidation resistant films of the stripe-shaped pattern layers as a mask;
• (viii) exposing surfaces of the stripe-shaped convex portions and the semiconductor substrate while leaving the thick insulating film, and then forming an insulating film on exposed surfaces;
• (ix) forming a first conductive film on an overall surface;
• (x) forming first and second conductive sidewalls on side surfaces of the stripe-shaped convex portions via the insulating films to overlap with end portions of the thick insulating films respectively by anisotropic-etching the first conductive film;
• (xi) forming insulating films, whose film thickness is thinner than a film thickness of the thick insulating film, on surfaces of the first and second conductive sidewalls;
• (xii) forming a second conductive film on an overall surface;
• (xiii) forming a plurality of stripe-shaped control gates in a row direction at a distance by patterning the second conductive film;
• and
• (xiv) removing sequentially the insulating films and the first and second conductive sidewalls in regions between neighboring control gates to execute an element isolation, and forming first and second floating gates on side surfaces of the stripe-shaped convex portions under the control gates respectively.

A semiconductor memory device driving method of driving a semiconductor memory device containing a semiconductor memory element which comprises a one conductivity type semiconductor substrate on which a convex portion having a pair of opposing side surfaces is provided, a pair of opposite conductivity type source/drain regions formed on a surface of the semiconductor substrate on both sides of the convex portion, a first insulating film for covering an upper surface of the convex portion, second insulating films for covering the side surfaces of the convex portion and the source/drain regions, a pair of floating gates provided on the side surfaces of the convex portion respectively to oppose to the side surfaces and the source/drain regions via the second insulating film respectively, third insulating films formed on the floating gates, and control gates provided to oppose to the upper surface of the convex portion via the first insulating film and oppose to the floating gates via the third insulating film respectively, and the semiconductor memory element in which a surface region of the convex portion, which is arranged between the source/drain regions and extends from one side surface of the convex portion to other side surface via an upper surface, acts as a channel region,

• the method comprising the steps of:
• generating high energy charges in the channel by applying a voltage to the source/drain region as a drain and the control gate;
• and
• injecting the charges into the floating gate on the drain side via the second insulating film to accumulate the charges therein so as to control a threshold voltage of the semiconductor memory element.

A semiconductor memory device driving method of driving a semiconductor memory device containing a semiconductor memory element which comprises a one conductivity type semiconductor substrate on which a convex portion having a pair of opposing side surfaces is provided, a pair of opposite conductivity type source/drain regions formed on a surface of the semiconductor substrate on both sides of the convex portion, a first insulating film for covering an upper surface of the convex portion, second insulating films for covering the side surfaces of the convex portion and the source/drain regions, a pair of floating gates provided on the side surfaces of the convex portion respectively to oppose to the side surfaces and the source/drain regions via the second insulating film respectively, third insulating films formed on the floating gates, and control gates provided to oppose to the upper surface of the convex portion via the first insulating film and oppose to the floating gates via the third insulating film respectively, and the semiconductor memory element in which a surface region of the convex portion, which is arranged between the source/drain regions and extends from one side surface of the convex portion to other side surface via an upper surface, acts as a channel region,

• the method comprising the steps of:
• programming the first bit consisting of any one of the first binary value and the second binary value, wherein the first binary value is a state that charges are injected and accumulated in a one floating gate by applying a program voltage to the control gate and a one source/drain region and the second binary value is a state that the charges are not accumulated in the one floating gate;
• programming the second bit consisting of any one of the third binary value and the fourth binary value, wherein the third binary value is a state that the charges are injected and accumulated in an other floating gate by applying the program voltage to the control gate and an other source/drain region and the fourth binary value is a state that the charges are not accumulated in the other floating gate;
• reading the first bit consisting of any one of the first binary value corresponding to a first drain current value and the second binary value corresponding to a second drain current value larger than the first drain current value by applying a read voltage to the other source/drain region as a drain with respect to the one source/drain region as a source to detect a drain current flowing through the source and the drain;
• reading the second bit consisting of any one of the third binary value corresponding to a third drain current value and the fourth binary value corresponding to a fourth drain current value larger than the third drain current value by applying a read voltage to the one source/drain region as a drain with respect to the other source/drain region as a source to detect a drain current flowing through the source and the drain;
• and
• erasing data by applying an erase voltage to at least any one of the source/drain regions and the semiconductor substrate via the control gate to exhaust charges that are accumulated in any one of the floating gates.