Pattern detection, processing and testing apparatus

A pattern detecting apparatus detecting whether or not a pattern exists on a detected surface, comprising:

• illumination device which irradiates an irradiation light to a plurality of irradiation areas separated from the detected surface, the irradiation light being irradiated to adjacent irradiation areas from different directions;
• imaging device which images the irradiation areas by a plurality of pixels having a predetermined pixels pitch;
• and
• image processing device which detects a concentration change of a moire image obtained by the imaging device, detects a phase difference of the concentration change of the moire image in the adjacent irradiation areas, and judges whether or not the pattern exists.

A pattern detecting apparatus detecting whether or not a pattern provided on a detected surface of a tested body exists, comprising:

• illumination device which irradiates an irradiation light to a plurality of irradiation areas separated from the detected surface, the irradiation light being irradiated to adjacent irradiation areas from different directions;
• imaging device which sequentially inputs an image of a line-shaped imaging area at a predetermined resolution, the line shaped imaging area crossing to a predetermined transfer direction in which the detected surface is transferred;
• and
• image processing device which detects a concentration change of a moire image obtained by the imaging device, detects a phase difference of the concentration change of the moire image in the adjacent irradiation areas, and judges whether or not the pattern exists.

A pattern detecting apparatus detecting a pattern on a detected surface of a subject, comprising:

• illuminating device which irradiates a predetermined number of illumination lights having different properties to the detected surface from different directions;
• color separation image pick-up device which provides with an imaging device and a filter arranged on an optical path of a reflected light being reflected from the detected surface, separates the reflected light into small areas, corresponds to a light emitting wavelength and transmits different light emitting wavelengths in adjacent small areas respectively, and applies a color separation to the reflected light from the detected surface so as to respectively pick up a predetermined number of images;
• and
• Image-processing device which judges an existence of the pattern or a height thereof on the basis of a difference image between the predetermined images obtained by the color separation image pick-up device.

A pattern detecting apparatus detecting a pattern on a detected surface of a subject, comprising:

• illuminating device which irradiates a predetermined number of illumination light having different properties to the detected surface from different directions;
• color separation image pick-up device provided with an imaging device separating an reflected light into wavelengths corresponding to light emitting properties so as to pick up respectively, and applying a color separation to the reflected light from the detected surface so as to respectively pick up a predetermined number of images;
• and
• Image-processing device which judges an existence of the pattern or a height thereof on the basis of a difference image between the predetermined images obtained by the color separation image pick-up device.