Ion beam deposition targets having an interlocking interface and a replaceable insert

A target source according to claim 3, wherein the mechanical interlocking lip structure is formed substantially as shown in FIGS. 1-4.

A method of reusing an eroded deposition target source used for ion deposition of a material from the target source, comprising the steps of:

• (a) forming the target source in at least two separate parts made of the same deposition material and comprising an insert, from which the material is to be used for deposition, and an outer part at least substantially surrounding the insert by an interface to prevent contaminants from passing between the parts;
• (b) affixing both parts to a backing plate for insertion into an ion beam deposition machine for deposition of material substantially from the insert onto a substrate, thereby eroding the insert;
• (c) removing from the ion beam deposition machine at least the insert after deposition and replacing it in the ion beam deposition machine with a new uneroded insert for further deposition using material from the new uneroded insert.