Processing apparatus with sealing mechanism

A processing apparatus with sealing mechanism, comprising a processing container having a processing container body with an opening and a closing member for closing the opening, the processing container defining a processing chamber therein, and also making an object to be processed that is positioned in the processing chamber, to contact a processing fluid thereby processing the object, wherein

• either one of the processing container body and the closing member is provided, at a closing part formed between the processing container body and the closing member, with a deformable hollow sealing member which is deformable against the processing container body or the closing member;
• and
• the deformable hollow sealing member has a hollow part connected to a closing switching valve and a pressure regulator.

A processing apparatus with sealing mechanism, comprising a processing container having a processing container body with an opening and a closing member for closing the opening, the processing container defining a processing chamber therein, and also making an object to be processed that is positioned in the processing chamber, to contact a processing fluid thereby processing the object, wherein

• either one of the processing container body and the closing member is provided, at a closing part formed between the processing container body and the closing member, with a flexible hollow sealing member;
• and
• a source of pressurized fluid is connected to a hollow part of the hollow sealing member through a fluid pipeline interposing a heat regulator for pressurized fluid.

A processing apparatus with sealing mechanism, comprising a processing container having a processing container body with an opening capable of discharging a processing fluid and a closing member for closing the opening, the processing container defining a processing chamber therein, and also making an object to be processed that is positioned in the processing chamber to contact the processing fluid thereby processing the object, wherein

• either one of the processing container body and the closing member is provided, at a closing part formed between the processing container body and the closing member, with a flexible hollow sealing member;
• and
• a source of pressurized fluid is connected to a hollow part of the hollow sealing member through a fluid pipeline interposing a heat regulator for pressurized fluid.

A processing apparatus with sealing mechanism, comprising a processing container having a processing container body with an opening capable of loading and unloading an object to be processed and a closing member for closing the opening, the processing container defining a processing chamber therein, and also making the object that is positioned in the processing chamber to contact a processing fluid thereby processing the object, wherein

• either one of the processing container body and the closing member is provided, at a closing part formed between the processing container body and the closing member, with a flexible hollow sealing member;
• and
• a source of pressurized fluid is connected to a hollow part of the hollow sealing member through a fluid pipeline interposing a heat regulator for pressurized fluid.

A processing apparatus with sealing mechanism, comprising a processing container having an opening, a holder for holding an object to be processed in a processing chamber defined in the processing container, and a rod provided, at an end thereof, with the holder and also slidably inserted into the opening, and also making the object held by the holder to contact a processing fluid thereby processing the object, wherein

• a flexible hollow sealing member is arranged on the processing container sliding with respect to the rod;
• and
• a source of pressurized fluid is connected to a hollow part of the hollow sealing member through a fluid pipeline interposing a heat regulator for pressurized fluid.