US 2002/0053321 A1Published application

Coating film forming apparatus and coating film forming method

AssigneeTokyo Electron Limited

InventorsHiroshi Tomita, Kunie Ogata, Kiminari Sakaguchi, Yasuharu Iwashita, Ryouichi Uemura, Masahiro Nakatsuru

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Abstract

A plurality of production line recipes and film thickness measurement recipes that recite the same type of coating solution, but different target film thickness are prepared in a coating unit. Recipes that recite the same types of coating solution and the same film thickness are linked to a common spin curve. A film thickness measurement recipe is executed so as to calculate a compensated value for a revolving speed for each measured data of the film thickness. The designated values of revolving speeds of individual recipes can be compensated using the compensated value at a time.

Claims10

Dependent claims

An apparatus forming a coating film, comprising:

a carrier holding portion holding a carrier that contains a plurality of substrates;
a transfer mechanism extracting a substrate from the carrier held on the carrier holding portion and transferring the substrate;
a coating unit, having a substrate holding portion horizontally holding the substrate transferred from the transfer mechanism, the coating unit supplying coating solution to the substrate, and rotating the substrate holding portion so as to spread the coating solution on the substrate with a centrifugal force of a revolving speed of the substrate and thereby form a coating film on a front surface of the substrate;
a film thickness measuring unit measuring a film thickness of the coating film formed on the front surface of the substrate;
a data storing portion storing a revolving speed—film thickness data that represents the relation between the revolving speed of the substrate and the film thickness of the coating film coated in a coating process at the coating unit;
a recipe creating portion creating a recipe that recites a process condition group containing a target film thickness of the coating film of the coating unit and the revolving speed of a plurality of said substrates when the coating process is performed at the coating unit;
and
a revolving speed compensating portion compensating a set value of a plurality of said revolving speeds corresponding to the target film thickness designated by a plurality of the created recipes, the measured data of the film thickness, and the revolving speed—film thickness data assigned to the recipe so that the film thickness of the coating film satisfies the target value,
wherein a plurality of recipes are assigned to a common revolving speed—film thickness data, when the revolving speed of one recipe out of a plurality of other recipes is compensated, the revolving speeds of the other recipes are being compensated.

6 more elements

A method forming a coating film, comprising the steps of:

creating a recipe that recites a target film thickness of a coating film formed on a substrate and a revolving speed of the substrate at which a coating process is performed by a coating unit;
causing the coating unit to supply a coating solution to the substrate, revolving the substrate along a horizontal surface at the revolving speed designated at the creating step so as to spread the coating solution with a centrifugal force and form the coating film on a front surface of the substrate;
measuring a film thickness of the coating film formed on the front surface of the substrate;
determining a compensated value of the revolving speed corresponding to the target film thickness designated in the recipe, the measured data of the film thickness of the coating film measured at the measuring step, and a pre-created revolving speed—film thickness data assigned to the recipe so as to reach the film thickness of the coating film to a target value;
and
compensating a plurality of revolving speeds of other recipes assigned to a common revolving speed—film thickness data when the revolving speed of one of the recipes is compensated.

3 more elements

Dependencies are inferred from the claim text.