Process for purifying perfluorinated products

Nitrogen trifluoride (NF3) containing less than 10 parts-per-million-molar of fluorinated impurities.

Nitrogen trifluoride (NF3) containing less than 10 parts-per-million-molar tetrafluoromethane (PFC-14).

Nitrogen trifluoride (NF3) containing less than 3 parts-per-million-molar tetrafluoromethane (PFC-14).

Nitrogen trifluoride (NF3) containing less than 1 parts-per-million-molar tetrafluoromethane (PFC-14).

99.999 molar percent pure nitrogen trifluoride (NF3).

99.9999 molar percent pure nitrogen trifluoride (NF3).

An azeotropic or azeotrope-like composition consisting essentially of from about 20 to about 55 mole percent tetrafluoromethane (PFC-14) and from about 80 to about 45 mole percent nitrogen trifluoride (NF3), said composition having a boiling point from about −110° C. at 47 psia to about −40° C. at 645 psia.

An azeotropic or azeotrope-like composition consisting essentially of from about 7 to about 9 mole percent hydrogen chloride (HCl) and from about 93 to about 91 mole percent tetrafluoromethane (PFC-14), said composition having a boiling point from about −110° C. at 77 psia to about −50° C. at 497 psia.

An azeotropic or azeotrope-like composition consisting essentially of from about 94 to about 93 mole percent nitrogen trifluoride (NF3) and from about 6 to about 7 mole percent hydrogen chloride (HCl), said composition having a boiling point from about −100° C. at 79 psia to about −50° C. at 487 psia.

An azeotropic or azeotrope-like composition consisting essentially of from about 95 to about 90 mole percent nitrous oxide (N2O) and from about 5 to about 10 mole percent trifluoromethane (HFC-23), said composition having a boiling point from about −90° C. at 13 psia to about 25° C. at 824 psia.

An azeotropic or azeotrope-like composition consisting essentially of from about 76 to about 83 mole percent nitrous oxide (N2O) and from about 24 to about 17 mole hydrogen chloride (HCl), said composition having a boiling point from about −90° C. at 14 psia to about 25° C. at 828 psia.

A process for separating nitrogen trifluoride (NF3) from a first mixture comprising nitrogen trifluoride (NF3) and tetrafluoromethane (PFC-14) wherein the amount of nitrogen trifluoride (NF3) in the first mixture is in excess of the amount of nitrogen trifluoride (NF3) in an azeotropic or azeotrope-like composition comprising nitrogen trifluoride (NF3) and tetrafluoromethane (PFC-14), comprising:

• distilling the first mixture to form a second mixture comprising an azeotropic or azeotrope-like composition comprising nitrogen trifluoride (NF3) and tetrafluoromethane (PFC-14),
• recovering the second mixture as a distillation column overhead stream, and
• recovering nitrogen trifluoride (NF3) as a distillation column bottom stream.

A process for separating tetrafluoromethane (PFC-14) from a first mixture comprising nitrogen trifluoride (NF3) and tetrafluoromethane (PFC-14) wherein the amount of tetrafluoromethane (PFC-14) in the first mixture is in excess of the amount of tetrafluoromethane (PFC-14) in an azeotropic or azeotrope-like composition comprising nitrogen trifluoride (NF3) and tetrafluoromethane (PFC-14), comprising:

• distilling the first mixture to form a second mixture comprising an azeotropic or azeotrope-like composition comprising nitrogen trifluoride (NF3) and tetrafluoromethane (PFC-14),
• recovering the second mixture as a distillation column overhead stream, and
• recovering tetrafluoromethane (PFC-14) as a distillation column bottom stream.

A process for separating tetrafluoromethane (PFC-14) from nitrogen trifluoride (NF3) comprising distilling a mixture comprising nitrogen trifluoride (NF3) and tetrafluoromethane (PFC-14) in the presence of entraining agent.

A process for separating a fluorocompound selected from the group consisting of tetrafluoromethane (PFC-14) and nitrogen trifluoride (NF3) from a first mixture of the fluorocompound and other compounds, comprising:

• contacting the first mixture with hydrogen chloride (HCl) to form a second mixture,
• distilling the second mixture to form an azeotropic or azeotrope-like composition comprising fluorocompound and hydrogen chloride (HCl) and recovering the azeotropic or azeotrope-like composition as distillation column overhead stream.

A process for separating tetrafluoromethane (PFC-14) from a first mixture comprising tetrafluoromethane (PFC-14) and nitrogen trifluoride (NF3), comprising:

• contacting the first mixture with hydrogen chloride (HCl) to form a second mixture,
• distilling the second mixture and recovering as a distillation column overhead stream an azeotropic or azeotrope-like composition comprising hydrogen chloride (HCl) and nitrogen trifluoride (NF3), and
• recovering as a distillation column bottom stream a composition comprising tetrafluoromethane (PFC-14).

A process for separating nitrogen trifluoride (NF3) from a first mixture comprising tetrafluoromethane (PFC-14) and nitrogen trifluoride (NF3), comprising:

• contacting the first mixture with hydrogen chloride (HCl) forming a second mixture,
• distilling the second mixture and recovering as a distillation column overhead stream an azeotropic or azeotrope-like composition comprising hydrogen chloride (HCl) and tetrafluoromethane (PFC-14), and
• recovering as a distillation column bottom stream a composition comprising nitrogen trifluoride (NF3).

A process for separating nitrogen trifluoride (NF3) and tetrafluoromethane (PFC-14), comprising:

• contacting a first mixture comprising nitrogen trifluoride (NF3) and tetrafluoromethane (PFC-14) with an entraining agent to form a second mixture, and
• distilling the second mixture and recovering a distillation column overhead stream comprising tetrafluoromethane (PFC-14) and a distillation column bottom stream comprising entraining agent and nitrogen trifluoride (NF3).