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US 2002/0001164 A1Published application
Method for manufacturing capacitor in semiconductor device and the capacitor
AssigneeHynix Semiconductor Inc.
InventorsByoung Kwon Ahn, Dong Soo Park
Life of this patent
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Abstract
In the method for manufacturing a capacitor in a semiconductor device, a nitride film is formed over a lower electrode on a semiconductor substrate, and a TaON film is formed over the nitride film. The Al2O3 film is formed over the TaON film, and an upper electrode is formed over the Al2O3 film.
Claims25
A method for manufacturing a capacitor in a semiconductor device, comprising:
- forming a nitride film over a lower electrode, which is on a semiconductor substrate;
- forming a TaON film over the nitride film;
- forming an Al2O3 film over the TaON film;
- and
- forming an upper electrode over the Al2O3 film.
2 more elements
A method for manufacturing a capacitor in a semiconductor device, comprising:
- forming a nitride film over the lower electrode, which is on a semiconductor substrate, by using plasma;
- forming an amorphous TaON thin film over the nitride film;
- subjecting the amorphous TaON thin film to an RTA (Rapid Thermal annealing) treatment;
- forming an Al2O3 film over the amorphous TaON thin film;
- subjecting the Al2O3 film to a furnace vacuum thermal treatment;
- and
- forming a polysilicon film over the Al2O3 film to form an upper electrode.
4 more elements
A method of manufacturing a capacitor in a semiconductor substrate, comprising:
- forming a nitride film over a lower electrode on a semiconductor substrate;
- forming a TaON film over the nitride film;
- forming a non-titanium based contact layer on the TaON film;
- and
- forming an upper electrode over the non-titanium based contact layer.
2 more elements
A capacitor comprising:
- a lower electrode;
- a nitride film formed on the lower electrode;
- a TaON film formed over the nitride film;
- an Al2O3 film formed over the TaON film;
- and
- an upper electrode formed on the Al2O3 film.
3 more elements
Dependencies are inferred from the claim text.