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US 2002/0001088 A1Published application
Apparatus for wavefront detection
AssigneeCarl Zeiss SMT GmbH
InventorsUlrich Wegmann, Helmut Haidner, Martin Schriever
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Abstract
An apparatus for wavefront detection includes a wavefront source for the production of a wavefront, an optical system transforming the wavefront, a diffraction grating through which the transformed wavefront passes, and a spatially resolving detector following the diffraction grating. The wavefront source has a two-dimensional structure.
Claims78
An apparatus for wavefront detection, comprising:
- a wavefront source for production of a wavefront,
- a diffraction grating following the wavefront source, and
- a spatially resolving detector following the diffraction grating,
- wherein
- said wavefront source has a two-dimensional structure.
2 more elements
An apparatus for wavefront detection, comprising:
- a diffraction grating through which a wavefront passes, and
- a spatially resolving detector following said diffraction grating,
- wherein
- said detector is curved at least regionally toward said diffraction grating.
1 more element
A process for wavefront detection, comprising the steps of
- producing a wavefront by a wavefront source,
- producing an interferogram with the wavefront and with a diffraction grating having a diffracting periodic structure respectively in different periodicity directions,
- recording an image of the interferogram with a radiation-sensitive detector, and
- displacing the wavefront source or the diffraction grating in one periodicity direction by an integral multiple of a corresponding grating period.
1 more element
A process for wavefront detection, comprising the steps of producing a wavefront by a wavefront source,
- producing an interferogram with the wavefront and with a diffraction grating having a diffracting periodic structure respectively in different periodicity directions, and
- displacing the wavefront source or the diffraction grating by a fraction of the corresponding grating period, and detecting the resulting interferogram,
- repeating the displacement step, and averaging the interferograms detected in the individual displacement steps for the wavefront detection.
Dependencies are inferred from the claim text.