Projection exposure apparatus and method of controlling same

A projection exposure apparatus comprising:

• projection optics for projecting a pattern, which has been formed on a original plate, onto a substrate;
• a stage on which the substrate is placed and which is movable along the direction of an optic axis of said projection optics and in a direction orthogonal to the direction of the optic axis;
• surface position measurement means for measuring relative position of the surface of the substrate, which has been placed upon said stages with respect to a predetermined position decided based upon the position of the projection optics;
• vibration measurement means, which has a plurality of vibration sensors, for measuring vibration of said projection optics;
• and
• driving means for controlling drive of said stage based upon results of measurement by said surface position measurement means and said vibration measurement means.

A method of controlling a projection exposure apparatus having projection optics for projecting a pattern, which has been formed on a original plate, onto a substrate, and a stage on which the substrate is placed and which is movable along the direction of an optic axis of said projection optics and in a direction orthogonal to the direction of the optic axis, said method comprising:

• a surface position measurement step of measuring relative position of the surface of the substrate, which has been placed upon the stage, with respect to a predetermined position decided based upon the position of the projection optics;
• a vibration measurement step of measuring vibration of said projection optics by a plurality of vibration sensors;
• and
• a driving step of controlling drive of said stage based upon results of measurement at said surface position measurement step and said vibration measurement step.

A method of manufacturing a device using a projection exposure apparatus having projection optics for projecting a pattern, which has been formed on a original plate, onto a substrate, and a stage on which the substrate is placed and which is movable along the direction of an optic axis of said projection optics and in a direction orthogonal to the direction of the optic axis, said method comprising:

• a supply step of placing the substrate on said stage;
• a surface position measurement step of measuring relative position of the surface of the substrate, which has been placed upon the stage, with respect to a predetermined position decided based upon the position of the projection optics;
• a vibration measurement step of measuring vibration of said projection optics by a plurality of vibration sensors;
• and
• a driving step of controlling drive of said stage based upon results of measurement at said surface position measurement step and said vibration measurement step.