US 2002/0001070 A1Published application

System for adjusting a photo-exposure time

AssigneeSamsung Electronics Co., Ltd.

InventorChan-Hoon Park

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Abstract

A system is provided for adjusting a photo-exposure time of a manufacturing apparatus for semiconductor devices. The system for adjusting the photo-exposure time includes a photo-exposure unit whose photo-exposure time is adjustable according to one or more adjustment signals, a pre-exposure step influence prediction unit that obtains pre-exposure step processing information and extracts parameters that may influence a resulting pattern during photo-exposure, and provides this information as feed forward data, an inspection unit that checks processed steps during a certain period after photo-exposure and provides an inspection value as a feed back data, and a central processing unit that receives the feed forward and feedback data and, by means of a predetermined calculation method, generates the one or more adjustment signals, which are used to adjust the photo-exposure time.

Claims8

Dependent claims

A system for adjusting a photo-exposure time in a semiconductor manufacturing apparatus, the system comprising:

a photo-exposure unit for adjusting a photo-exposure time of a photo-exposure step performed on a semiconductor device in the semiconductor manufacturing apparatus, in accordance with one or more adjustment signals;
a pre-exposure step influence prediction unit for obtaining information about a semiconductor device in the manufacturing apparatus during a pre-exposure processing, prior to the device being subjected to the photo-exposure step, the information including a value of a factor that will influence a line width of a line formed on the semiconductor device in the photo-exposure step, and providing that information as feed forward data;
an inspection unit for generating an inspection value by measuring an aspect of the semiconductor device after it has been subjected to the photo-exposure step, and providing the inspection value as feed back data;
and
a central processing unit for receiving the feed forward data and the feed back data, and generating the one or more adjustment signals based on the feed forward data and the feed back data.

2 more elements

Dependencies are inferred from the claim text.