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US 2002/0001018 A1Published application
Ink jet head and method of producing the same
AssigneeRicoh Company, Ltd.
InventorsSEIICHI KATOH, YUKITO SATO, MASAYOSHI ESASHI
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Abstract
An ink jet head and a method of producing the same are disclosed. Use is made of a sufficiently thick single crystal at the time of anodic bonding, so that a vibration plate is free from deformation without resorting to any special short-circuit electrode.
Claims3
An ink jet head comprising:
- a substrate;
- a plurality of nozzles;
- a plurality of ink passageways each being communicated to a respective one of said plurality of nozzles;
- a vibration plate positioned in a part of each of said plurality of ink passageways;
- a plurality of independent electrodes formed on said substrate and facing said vibration plate;
- and
- a common electrode formed on said vibration plate;
- wherein a drive voltage is applied between said common electrode and any one of said plurality of independent electrodes for causing said vibration plate to electrostatically deform, thereby ejecting a drop of ink from one of said plurality of nozzles associated with the one independent electrode, wherein said vibration plate comprises single crystal Si while said substrate comprises glass having a coefficient of linear expansion close to a coefficient of linear expansion of said single crystal Si at temperatures between 200° C. and 400° C., and wherein after said single crystal Si has been bonded to said substrate by anodic bonding, said single crystal Si is thinned to a preselected thickness by etching or grinding, and then an ink passageway, ink chamber and nozzle section is adhered or bonded to said substrate.
5 more elements
Dependencies are inferred from the claim text.