Liquid processing apparatus

A liquid processing apparatus, in which a process liquid is supplied to a substrate for performing a liquid processing, comprising:

• a holder for holding substantially in parallel a plurality of substrates a predetermined distance apart from each other;
• a container delivery section for delivering a container having a plurality of substrates housed therein substantially horizontal a predetermined distance apart from each other;
• a substrate transfer device for transferring a plurality of substrates in a substantially horizontal state between a container disposed in said container delivery section and said holder;
• a posture changing mechanism for changing the posture of said holder such that a state of the substrates held by said holder changes between substantially vertical and substantially horizontal;
• a process chamber, which houses said holder, for applying said liquid processing to the substrate held substantially vertical by said holder;
• a moving mechanism for sliding both said holder and said posture changing mechanism such that said holder is housed in said process chamber;
• and
• a holder transfer/rotation driving mechanism for transferring said holer within said process chamber and rotating said holder.

A liquid processing apparatus, in which a process liquid is supplied to a substrate for performing a liquid processing, comprising:

• a holder for holding a substrate;
• a rotor for rotating said holder;
• a process chamber, which includes a delivery port for moving said holder into and out of said process chamber and houses said holder, for applying said liquid processing to the substrate held by said holder;
• and
• a lid for closing the delivery port formed in said process chamber under the state that said holder is housed in said process chamber;
• wherein said holder, said rotor and said lid are formed as an integral structure.