Polishing pad with a partial adhesive coating
AssigneeApplied Materials, Inc.
InventorRobert D. Tolles
Life of this patent
Estimating the term…
Abstract
??Training A method for selectively altering a polishing pad adhesive layer includes providing a mask having transparent regions and opaque regions and directing radiation toward the mask so that the radiation passes through the transparent regions and impinges onto the adhesive layer on the polishing pad. The area of the adhesive layer corresponding to the transparent regions of the mask is cured to be less adhesive. The area of the adhesive layer corresponding to the opaque regions remain adhesive.
Claims37
A polishing pad comprising:
- a first layer having a polishing surface;
- and
- a second layer having an adhesive region and a cured region disposed opposite the polishing surface.
An apparatus for selectively altering the adhesive strength of a polishing pad adhesive layer, comprising:
- a radiation source to generate radiation;
- a support for the polishing pad;
- and
- a mask having a transparent region and an opaque region, said mask being disposed between the radiation source and the polishing pad adhesive layer, such that the radiation passes through the transparent region and is blocked by the opaque region.
A method for selectively altering the adhesive strength of a polishing pad adhesive layer, comprising:
- providing a mask having a transparent region and an opaque region;
- directing radiation toward the mask so that the radiation is blocked by the opaque region and passes through the transparent region to impinge on the adhesive layer on the polishing pad, whereby the area of the adhesive layer corresponding to the transparent region of the mask is cured to be less adhesive.
A method for selectively altering the adhesive strength of a polishing pad adhesive layer, comprising:
- providing a polishing pad having a layer of adhesive that covers substantially an entire surface of the pad;
- and
- curing selected portions of the adhesive layer to reduce adhesive strength of the layer.
Dependencies are inferred from the claim text.