US 2001/0055151 A1 · Scanning probe microscope and method of processing signals in the same

Abstract

A scanning probe microscope includes (a) a first device which causes a relative displacement between an object and a probe, (b) a detector which detects a change in interaction caused by the first device between the probe and the object, (c) a second device which feeds the detected change back to the relative displacement to keep the interaction equal to a constant, (d) an adder which adds the detected change to the constant while the interaction is fed back to a distance between the probe and the object, to thereby temporarily vary the constant, (e) a collector which collects signals relating to a displacement which signals are varied as the constant is varied, and calculates a relation among the signals, and (f) a third device which returns the temporarily varied constant back to the constant for scanning the object, calculates products of the relation with each of the signals in real-time, and sums the products, which products indicate a profile of a surface of the object.

Claims59

Dependent claims

A method of processing a signal in a scanning probe microscope, including the steps of:

(a) causing a relative displacement between an object and a probe;
(b) detecting a change in interaction caused between said probe and said object by said relative displacement;
(c) feeding the detected change back to said relative displacement to keep said interaction equal to a constant;
said method further including the steps of:
(d) adding said detected change to said constant while said interaction is fed back to a distance between said probe and said object, to thereby temporarily vary said constant, said step (d) being to be carried out before scanning said object;
(e) collecting signals relating to a displacement which signals are varied as said constant is varied, and operating a relation among said signals;
and
(f) returning said temporarily varied constant back to said constant for scanning said object, calculating products of said relation with each of said signals in real-time, and summing said products, which products indicate a profile of a surface of said object.

5 more elements

A scanning probe microscope comprising:

(a) a first device which causes a relative displacement between an object and a probe;
(b) a detector which detects a change in interaction caused by said first device between said probe and said object;
(c) a second device which feeds the detected change back to said relative displacement to keep said interaction equal to a constant;
(d) a third device which varies said constant while said change is being fed back to said relative displacement and said object is not being scanned;
(e) a calculator which calculates a change rate of a first signal relative to a second signal, said first signal being transmitted from said probe and varied as said constant is varied, said second signal being transmitted from said third device;
and
(f) a fourth device which synthesizes said first and second signals in real-time to thereby transmit a third signal indicative of a profile of a surface of said object, based on said change rate.

4 more elements

A scanning probe microscope comprising:

(a) a first device which causes a relative displacement between an object and a probe;
(b) a detector which detects a change in interaction caused by said first device between said probe and said object;
(c) a second device which feeds the detected change back to said relative displacement to keep said interaction equal to a constant;
(d) a measurement device which measures a displacement caused by said second device and transmits a first signal indicative of said displacement;
(e) a third device which varies said constant while said change is being fed back to said relative displacement and said object is not being scanned;
(f) a calculator which calculates change rates of said first signal relative to each of second signals, said first signal being varied in accordance with a displacement caused by said third device, said second signals being independent of said measurement device;
and
(f) a fourth device which synthesizes said first and second signals in real-time to thereby transmit a third signal indicative of a profile of a surface of said object, based on said change rates.

5 more elements

Dependencies are inferred from the claim text.

Scanning probe microscope and method of processing signals in the same

Life of this patent

Scanning probe microscope and method of processing signals in the same

Life of this patent

Abstract

Claims59