Monitoring resistor element and measuring method of relative preciseness of resistor elements
OwnerItaru Inoueinventor
Life of this patent
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Abstract
A monitoring resistor element includes a plurality of resistors (1, 2) formed on an integrated circuit chip through the same fabrication steps as those used to form a practical circuit are connected to power source pads (3, 4, 5, 6), which are terminal pads formed on the integrated circuit chip. A method for measuring a relative preciseness of resistors (1, 2) formed on an integrated circuit chip includes the step of performing the relative preciseness of the resistors by using power source pads (3, 4, 5, 6), to which the resistors (1, 2) are connected and which are terminal pads formed on the integrated circuit chip, as measuring pads when the measurement of relative preciseness of the resistors (1, 2) is performed.
Claims6
A monitoring resistor element comprising:
- a plurality of resistors formed on an integrated circuit chip through the same fabrication steps as those used to form a practical circuit of said integrated circuit chip;
- and
- measuring pads connected to ends of said respective resistors, said measuring pads being terminal pads formed on said integrated circuit chip.
A method of measuring a relative preciseness of resistors formed on an integrated circuit chip, comprising the steps of:
- measuring values of said resistors by using terminal pads formed on said integrated circuit chip and connected to said resistor elements as measuring pads.
Dependencies are inferred from the claim text.