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US 2001/0054313 A1Published application
Low radiation capture cross-section electrode material for prompt radiation environments
AssigneeHoneywell International Inc.
InventorJohn T. Williams
Life of this patent
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Abstract
A transducer for use in any of an accelerometer, a piezo-resistive strain gauge, a piezoelectric transducer, and surface acoustic wave transducers, the transducer having a beam and an electrode deposited on the beam, wherein the electrode is formed of a material having properties as compared to gold of: a low radiation capture cross-section, and high electrical conductivity.
Claims21
A transducer comprising:
- a beam;
- an electrode deposited on the beam, wherein the electrode is formed of a material having properties as compared to gold of:
- a low radiation capture cross-section, and
- high electrical conductivity.
1 more element
A vibrating beam transducer having a metal electrode formed thereon, the transducer comprising:
- a plurality of vibrating beams;
- and
- a metal electrode formed on each of the vibrating beams, the metal selected from a group of metals having the properties of:
- a low radiation capture cross-section relative to gold, and
- an electrical conductivity comparable to gold.
2 more elements
A vibrating beam accelerometer, comprising:
- a substrate defining a first surface, the substrate having a frame and a proof mass suspended from the frame by one or more flexures;
- an active layer of semiconducting material coupled to the first surface of the substrate, wherein the active layer comprises a vibrating beam transducer mechanically coupled to the proof mass and the frame for detecting a force applied to the proof mass;
- an insulating layer between the active layer and the substrate to insulate the vibrating beam transducer from the substrate;
- a circuit coupled to the vibrating beam transducer of driving and sensing the vibrating beam transducer;
- and
- electrodes formed on the vibrating beam transducer of a material having a low radiation capture cross-section relative to gold.
3 more elements
A method of forming a vibrating beam transducer, the method comprising:
- forming one or more beams capable of vibrating at a resonance frequency;
- depositing a thin film of an electrically and thermally conductive material on the electrodes, the electrically and thermally conductive material having a radiation capture cross-section to gamma radiation less than that of gold.
Dependencies are inferred from the claim text.