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US 2001/0043404 A1Published application
Liquid immersion lens system and optical apparatus using the same
AssigneeOlympus Optical Co., Ltd.
InventorHitoshi Hatano
Life of this patent
Estimating the term…
Abstract
A low magnification liquid immersion objective lens system for use in a form observing apparatus, measuring apparatus and the like which uses an immersion liquid having a refractive index for the d-line within a range defined by a condition (1) shown below, and has a magnification β and a working distance WQDL which satisfy the following conditions (2) and (3): 1.34≦ND≦1.80 (1) β≦15 (2) WDL≦0.35 mm (3)
Claims12
A low magnification liquid immersion objective lens system which uses an immersion liquid having a refractive index ND within a range defined by a condition
- (1) shown below, and satisfies the following conditions (2) and (3):
- 1.34≦ND≦1.80 (1) β≦15 (2) WDL≦0.35 mm (3)
- wherein a reference symbol β represents a magnification of said objective lens system and a reference symbol WDL designate a working distance of said objective lens system:
An optical apparatus comprising:
- a plurality of objective lens system;
- and at least one observing means, wherein said objective lens systems include at least a low magnification liquid immersion objective lens system which has a magnification not higher than 15× and at least a high magnification liquid immersion objective lens system which has a magnification not lower than 15×, and wherein an immersion liquid has a refractive index ND for the d-line which satisfies the following condition (1):
- 1.34≦ND≦1.80 (1)
Dependencies are inferred from the claim text.