Lateral high-Q inductor for semiconductor devices

Abstract

An inductor for a semiconductor device comprises a plurality of loops connected in series and formed along a lateral axis of the semiconductor device. Each loop comprises a bottom leg, a top leg, and a pair of side legs. The bottom legs are parallel and extend along a first plane. The top legs are also parallel and extend along a second plane. The second plane is parallel to and separate from the first plane. The first and second planes are parallel to said lateral axis, and the side legs are perpendicular to the first and second planes. The top and side legs can be formed from copper. A barrier layer between the top legs and a substrate layer adjacent the top legs and between the side legs and the bottom legs and the substrate layer can also be provided. The barrier can be formed from tantalum.

Dependencies are inferred from the claim text.