US 2001/0043133 A1Published application

Thrust controllable actuator

AssigneeSMC Corporation

InventorsSeiji Takanashi, Shigeru Komoriya, Kazuya Tamura, Hisashi Yajima, Takashi Nagao

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Abstract

A thrust producer of a moving-magnet type includes a rod supported for upward and downward movements by an apparatus main body through an air hydrostatic bearing and a thrust producer for moving the rod up and down, the thrust producer has a magnet mounted to the rod to be displaced with the rod and a coil provided to the apparatus main body to generate magnetic force when the coil is energized, and the thrust producer produces thrust by an interaction of the magnet and the magnetic force generated by the coil.

Claims8

Dependent claims

A thrust controllable actuator comprising a rod supported for upward and downward movements by an apparatus main body and a thrust producer for producing thrust for moving said rod up and down,

wherein said rod is supported in a noncontact state by a bearing portion of said apparatus main body through an air hydrostatic bearing,
said thrust producer is of a moving-magnet type including a magnet mounted to said rod to be displaced with said rod and a coil provided to said apparatus main body to generate magnetic force when said coil is energized, and said thrust producer produces said thrust by an interaction of said magnet and said magnetic force generated by said coil.

Dependencies are inferred from the claim text.