Auxiliary gasline-heating unit in chemical vapor deposition
AssigneeUnited Microelectronics Corp.
InventorsJuen-Kuen Lin, Chien-Hsin Lai, Peng-Yih Peng, Fu-Yang Yu
Life of this patent
Estimating the term…
Abstract
An auxiliary gasline-heating unit is used in a chemical vapor deposition apparatus. The auxiliary gasline-heating unit serves to increase the exit temperature of the mixture of N2 gas and He-dilute gas in order to prevent TDMAT, Ti[N(CH3)2]4, from being condensed and becoming a gasline contaminant when the mixture mixes with the TDMAT and a carrier gas.
Claims4
A gasline system for delivering gases for chemical vapor deposition, the system comprising a Ti[N(CH3)2]4 ampule, a carrier gasline connected to the Ti[N(CH3)2]4 ampule, and a mixture gasline consisting of a nitrogen gasline and a helium-dilute gasline, wherein the mixture gasline is connected to the Ti[N(CH3)2]4 ampule in order to mix a carrier gas and the Ti[N(CH3)2]4 with a mixed gas comprising nitrogen gas and helium-dilute gas, an improvement to which system comprises an auxiliary gasline-heating unit located on an exit of the mixed gas comprising the nitrogen gas and the helium-dilute gas for increasing an exit temperature of the mixed gas comprising the nitrogen gas and the helium-dilute gas, wherein the auxiliary gasline-heating unit further comprises:
- a heater tape located on the mixture gasline for heating the mixture gasline;
- a temperature controller connected to the heater tape for controlling a temperature of the heater tape;
- and
- a power supply connected to the temperature controller for supplying a heating power.
A gasline system for delivering gases for chemical vapor deposition, the system comprising a Ti[N(CH3)2]4 ampule, a carrier gasline connected to the Ti[N(CH3)2]4 ampule, and a mixture gasline consisting of a nitrogen gasline and a helium-dilute gasline, wherein the mixture gasline is connected to the Ti[N(CH3)2]4 ampule in order to mix a carrier gas and Ti[N(CH3)2]4 with a mixed gas comprising a nitrogen gas and a helium-dilute gas, an improvement to which system comprises auxiliary gasline-heating units located on the nitrogen gasline and on the helium-dilute gasline for increasing exit temperatures of the nitrogen gas and the helium-dilute gas, respectively, wherein the auxiliary gasline-heating units further comprise:
- two heater tapes respectively located on the nitrogen gasline and the helium-dilute gasline for heating the nitrogen gasline and the helium-dilute gasline:
- a temperature controller connected to the two heater tapes for controlling temperatures of the two heater tapes;
- and
- a power supply connected to the temperature controller for supplying a heating power.
Dependencies are inferred from the claim text.