Holder assembly system and method in an emitted energy system for photolithography
AssigneeAdvanced Energy Systems, Inc.
InventorsEdwin G. Haas, Michael A. Peacock, Robert M. Gutowski
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Abstract
An emitted energy system for use in photolithography may include a holder assembly operable to precisely align a diffuser and a nozzle. In accordance with one embodiment of the present invention, a holder assembly (30) may comprise a nozzle mounting system (414) coupled to a housing assembly (400) to secure a nozzle (22). A diffuser mounting system (430) may be coupled to the housing assembly (400) to secure a diffuser (28). An alignment system (450) may operate to align the nozzle (22) and the diffuser (28) in a spatial relationship with each other to optimize operation of the diffuser (28) in relation to the nozzle (22).
Claims20
A holder assembly comprising:
- a nozzle mounting system coupled to a housing assembly to secure a nozzle;
- a diffuser mounting system coupled to the housing assembly to secure a diffuser;
- and
- an alignment system operable to align the nozzle and the diffuser in spatial relationship with each other to optimize operation of the diffuser in relation to the nozzle.
A semiconductor device fabricated with an emitted energy system, the emitted beam system comprising:
- an energy system and a fluid system that interact to produce an emitted energy, the emitted energy directed at a photolithography system interface to produce the semiconductor device;
- wherein the fluid system includes a holder assembly to align and secure a nozzle with a diffuser, the holder assembly comprising:
- a nozzle mounting system coupled to a housing assembly to secure the nozzle;
- a diffuser mounting system coupled to the housing assembly to secure the diffuser;
- and
- an alignment system operable to align the nozzle and the diffuser in spatial relationship with each other to optimize operation of the diffuser in relation to the nozzle.
A method of manufacturing a holder assembly to align and secure a nozzle and a diffuser, the method comprising the steps of:
- providing a housing assembly;
- fabricating a nozzle mounting system in the housing assembly, the nozzle mounting system having a nozzle restraining system;
- fabricating a diffuser mounting system in the housing assembly, the diffuser mounting system having a diffuser restraining system;
- and
- forming an aperture within the housing assembly.
Dependencies are inferred from the claim text.