Loading patent…
AssigneeBrooks Automation, Inc.
InventorsMANFRED ROESSLER, PETER VORBERG
Estimating the term…
A device and a method for detecting and distinguishing between shelf-forming supports in cassettes and disk-shaped objects deposited thereon are provided for increasing accuracy in the determination of the position of shelves and objects as well as reliability of detection in distinguishing between cassette types without a disruptive influence being exerted on the objects by the inserted protective supports. The objects and different types of supports for the objects which are distinguished through an offset arrangement in the measurement plane pass through measurement beam bundles with their end sides, wherein each of the measurement beam bundles is situated in the region of only one type of support. The extension of the end sides of the supports in the measurement plane is completely detected by the measurement beam bundle. The device is used for the fabrication of integrated circuits.
In a device for detecting and distinguishing between shelf-forming supports in cassettes and disk-shaped objects deposited thereon by displacement of supports and objects together relative to a measurement plane in the direction of shelves located one above the other, in which end sides of the supports and objects successively pass through bundles of measurement beams, wherein different types of supports are distinguished from one another by an offset arrangement in the measurement plane vertical to the measurement beam bundles, an improvement comprising:
In a method for detecting and distinguishing between shelf-forming supports in cassettes and disk-shaped objects deposited thereon by evaluation of signals which are formed by an interruption of measurement beam bundles due to displacement of the supports and objects together relative to a measurement plane in the direction of shelves located one above the other, in which end sides of the supports and objects successively pass through measurement beam bundles, wherein different types of supports can be distinguished through an offset arrangement in the measurement plane vertical to the measurement beam bundles, the method including the step of evaluating the signals of all of the measurement beam bundles, each of which is situated in the region of only one type of support and completely detects the extension of the end sides of the supports in the measurement plane, simultaneously and in correlation with one another.
Dependencies are inferred from the claim text.