Support device for a wafer shipping container
AssigneeShin-Etsu Polymer Co., Ltd.
InventorsToshitsugu Yajima, Hiroyuki Funami
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AssigneeShin-Etsu Polymer Co., Ltd.
InventorsToshitsugu Yajima, Hiroyuki Funami
Estimating the term…
A support device for a wafer shipping container, to constrain the flexure of a multiple number of backgrind-processed wafers when the wafers are stored in alignment in the wafer shipping container. For this support device, stoppers are projected inwards from the front and rear sides of a container body as a part of the wafer shipping container. The support device is comprised of: a pair of opposing walls, which are positioned on the bottom side of the container body and inserted into, and fixed by, the stoppers; a pair of connecting bars across the spacing between the paired opposing walls; a multiple number of partitioning supporters arranged with a predetermined pitch in the longitudinal direction of the paired connecting bars. The wafers are inserted and held between adjoining partitioning supporters, whereby they are prevented from flexing.
A support device for a wafer shipping container, for constraining the flexure of a multiple number of backgrind-processed wafers when the wafers are stored in alignment in the wafer shipping container, characterized in that stoppers for the support device are formed on the inner sides of the wafer shipping container, the support device is comprised of:
Dependencies are inferred from the claim text.