Method and apparatus for detecting line-shorts by potential and temperature distribution
AssigneeNEC Corporation
InventorHiroaki Kikuchi
Life of this patent
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Abstract
In a method for detecting a line-short between conductive layers, a potential (or temperature) distribution of the conductive layers is detected while applying a DC voltage thereto.
Claims40
A method for detecting a line-short between conductive layers comprising a step of detecting a potential distribution of said conductive layers while applying a DC voltage thereto.
A method for detecting a line-short between first and second comb-shaped conductive layers interdigitating each other, comprising the steps of:
- performing a DC test upon said first and second comb-shaped conductive layers;
- only when said DC test results in an abnormal state, detecting a first potential distribution for a wide range along a first direction perpendicular to pieces of said first and second comb-shaped conductive layers while a DC voltage is applied to said first and second comb-shaped conductive layers, to determine a first location whose potential is at an intermediate level of said DC voltage;
- and
- detecting a second potential distribution for a narrow range along said first direction around said first location while shifting along a second direction in parallel to the pieces of said first and second comb-shaped conductive layers to determine a second location whose difference in potential between said first and second comb-shaped conductive layers is minimum,
- thus determining that one line-short is generated at a location defined by said first and second locations.
A method for detecting a line-short between conductive layers comprising a step of detecting a temperature distribution of said conductive layers while applying a DC voltage thereto.
A method for detecting a line-short between first and second comb-shaped conductive layers interdigitating each other, comprising the steps of:
- performing a DC test upon said first and second comb-shaped conductive layers;
- only when said DC test results in an abnormal state, detecting a first temperature distribution for a wide range along a first direction perpendicular to pieces of said first and second comb-shaped conductive layers while a DC voltage is applied to said first and second comb-shaped conductive layers, to determine a first location whose temperature is higher than a predetermined temperature;
- and
- detecting a second temperature distribution for a narrow range along said first direction around said first location while shifting along a second direction in parallel to the pieces of said first and second comb-shaped conductive layers to determine a second location whose difference in temperature between said first and second comb-shaped conductive layers is inverted,
- thus determining that one line-short is generated at a location defined by said first and second locations.
An apparatus for detecting a line-short between conductive layers comprising a scanning potential microscope for detecting a potential distribution of said conductive layers while applying a DC voltage thereto.
An apparatus for detecting a line-short between first and second comb-shaped conductive layers interdigitating each other, comprising:
- a tester for performing a DC test upon said first and second comb-shaped conductive layers;
- a scanning potential microscope for detecting a first potential distribution for a wide range along a first direction perpendicular to pieces of said first and second comb-shaped conductive layers while a DC voltage is applied to said first and second comb-shaped conductive layers, to determine a first location whose potential is at an intermediate level of said DC voltage, and detecting a second potential distribution for a narrow range along said first direction around said first location while shifting along a second direction in parallel to the pieces of said first and second comb-shaped conductive layers to determine a second location whose difference in potential between said first and second comb-shaped conductive layers is minimum,
- thus determining that one line-short is generated at a location defined by said first and second locations.
An apparatus for detecting a line-short between conductive layers comprising a scanning thermal microscope for detecting a temperature distribution of said conductive layers while applying a DC voltage thereto.
An apparatus for detecting a line-short between first and second comb-shaped conductive layers interdigitating each other, comprising:
- a tester for performing a DC test upon said first and second comb-shaped conductive layers;
- a scanning thermal microscope for detecting a first temperature distribution for a wide range along a first direction perpendicular to pieces of said first and second comb-shaped conductive layers while a DC voltage is applied to said first and second comb-shaped conductive layers, to determine a first location whose temperature is higher than a predetermined temperature, and detecting a second temperature distribution for a narrow range along said first direction around said first location while shifting along a second direction in parallel to the pieces of said first and second comb-shaped conductive layers to determine a second location whose difference in temperature between said first and second comb-shaped conductive layers is inverted,
- thus determining that one line-short is generated at a location defined by said first and second locations.
Dependencies are inferred from the claim text.