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US 2001/0040249 A1Published application
Ferroelectric capacitor
OwnerDong-Jin Junginventor
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Abstract
A ferroelectric capacitor with a multilayer ferroelectric film to prevent degradation of its ferroelectric characteristics. The ferroelectric film is made of a lower PZT layer formed on a lower electrode and an upper titanium rich PZT or PbTiO3 layer. An upper electrode is formed on the second ferroelectric layer and a protection layer is formed to cover the ferroelectric capacitor.
Claims25
A ferroelectric capacitor, comprising:
- a first electrode;
- a second electrode;
- and
- a ferroelectric film between the first electrode and the second electrode, wherein an upper portion of the ferroelectric film contains a higher titanium concentration than a lower portion of the ferroelectric film.
1 more element
A method for fabricating a ferroelectric capacitor, comprising:
- forming a first electrode over a substrate;
- forming a ferroelectric film over the first electrode, wherein an upper portion of the ferroelectric film contains a higher titanium concentration than a lower portion of the ferroelectric film;
- and
- forming a second electrode over the ferroelectric film.
1 more element
A method of forming a ferroelectric film having a perovskite structure, comprising:
- forming a ferroelectric layer having a perovskite structure containing an upper region having a lower titanium concentration than a lower region;
- and
- supplementing the ferroelectric layer to form a ferroelectric film having a substantially uniform titanium concentration throughout its thickness.
Dependencies are inferred from the claim text.