A method of manufacturing a semiconductor device with a semiconductor diode, whereby a semiconductor body (10) is formed by a stack of, in that order as seen from the upper surface of the semiconductor body (10), a first semiconductor region (1) of a first conductivity type which is provided with a first connection conductor (5), a second semiconductor region (2) of a second conductivity type opposed to the first which is connected to a second connection conductor (6), while a rectifying junction is present between the first and the second semiconductor region (1, 2), characterized in that a portion (1A) of the first semiconductor region (1) is electrically insulated from the rest (1B) of the first semiconductor region (1), and the semiconductor body (10) is provided with means (3) by which said portion (1A) of the first semiconductor region (1) is conductively connected to the second semiconductor region (2), and the second connection conductor (6) is provided on said portion (11A) of the first semiconductor region (1).