Laser drilling machine and method for collecting dust
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsTatsuhiro Otsubo, Hiroyuki Naka, Naoko Matsuda
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Abstract
A dust collector for a laser drilling machine is provided between a lens table and a workpiece to be processed and includes an upper inlet port and a lower inlet port arranged on one side of a space defined by four side walls, and an exhaust port arranged opposite the inlet ports. The total amount of air supplied from the two inlet ports is 30 to 70% of the exhaust rate. The lower inlet port has an air supply capacity 1.5 to 4.5 times that of the upper inlet port.
Claims21
A laser drilling machine having a dust collector arranged between a lens table and a workpiece to be processed, comprising:
- four side walls for defining therein a space;
- an upper inlet port and a lower inlet port for introducing air into the space provided in one of the four side walls, the lower inlet port being capable of supplying air in an amount larger than an amount of air supplied by the upper inlet port;
- and
- an exhaust port for exhausting air from the space, provided in one of the four side walls opposite the upper inlet port and the lower inlet port.
A laser drilling machine having a dust collector arranged between a lens table and a workpiece to be processed, comprising:
- four side walls for defining therein a space;
- an upper inlet port and a lower inlet port for introducing air into the space provided in one of the four side walls;
- and
- an exhaust port for exhausting air from the space, provided in one of the four side walls opposite the upper inlet port and the lower inlet port, the exhaust port being capable of exhausting air in an amount larger than an air supply capacity of both of the upper inlet port and the lower inlet port.
A method for processing a workpiece by a laser drilling machine while collecting dust, comprising:
- providing a substantially closed space between a lens table and a workpiece to be processed;
- supplying air into the space from one side toward the other side thereof for creating a first draft of air;
- supplying air for creating a second draft of air parallel to and below the first draft of air in an amount larger than that supplied for creating the first draft of air;
- and
- exhausting air from the space from one side thereof downstream of the first draft of air and the second draft of air.
Dependencies are inferred from the claim text.