Method of manufacturing piezoelectric actuator
AssigneeSeiko Instruments Inc.
InventorsSatoshi Watanabe, Tatsuro Sato, Kazuo Tani, Yoko Shinohara
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AssigneeSeiko Instruments Inc.
InventorsSatoshi Watanabe, Tatsuro Sato, Kazuo Tani, Yoko Shinohara
Estimating the term…
A method of efficiently manufacturing desired piezoelectric actuators capable of being driven stably is disclosed. Each piezoelectric actuator includes a vibrating body constructed of a vibrator to which a piezoelectric body is mounted, a moving body for making contact with the vibrating body to move it, a pressure application member for applying appropriate pressure to the vibrating body and to the moving body, and a guide member for connecting together the vibrating body, the moving body, and the pressure application member. A second piezoelectric actuator assembly is fabricated by stacking a pressure application plate, a moving body plate, and a vibrating body plate on top of each other. The piezoelectric actuator assembly is cut at connector portions at once. A large number of piezoelectric actuators can be manufactured in one process step. Thus, the efficiency of manufacture can be improved. The connector portions are formed at vibrational nodes of the vibrating body. The connector portions are severed. Therefore, the vibrational characteristics of the vibrating body is affected less by the cutting operation. Consequently, piezoelectric actuators capable of being driven stably can be manufactured.
A method of manufacturing piezoelectric actuators, comprising the steps of:
A method of manufacturing piezoelectric actuators, comprising the steps of:
A method of manufacturing piezoelectric actuators, comprising the steps of:
A method of manufacturing piezoelectric actuators, comprising the steps of:
A method of manufacturing piezoelectric actuators, comprising the steps of:
A method of manufacturing piezoelectric actuators, comprising the steps of:
Dependencies are inferred from the claim text.