Semiconductor wafer polishing endpoint detecting system and method therefor

A semiconductor wafer polishing endpoint detecting system comprising:

• a first laser light source as a light source for a first inspection light of a predetermined wavelength;
• a first irradiation means for irradiating said first inspection light on said wafer with a predetermined diameter and a predetermined angle;
• a second laser light source as a light source for a second inspection light of a wavelength different from that of said first inspection light;
• a second irradiation means for irradiating said second inspection light to the same irradiating position and the same diameter as said first inspection light at a predetermined angle;
• a first photodetector located on a regular reflection light axis of said first inspection light reflected on said wafer, receiving said regular reflection light for outputting a first light amount signal;
• a second photodetector located on a regular reflection light axis of said second inspection light reflected on said wafer, receiving said regular reflection light for outputting a second light amount signal;
• first averaging means and second averaging means for receiving said first light amount signal and said second light amount signal and averaging said first light amount signal and said second light amount signal per a period synchronous with an integer multiple of rotation period of said wafer in discrete manner for outputting a first averaged data and a second averaged data;
• initial variation canceling means for disabling polishing endpoint detecting operation from initiation of polishing to elapse of a predetermined period for preventing detection of signal variation before stabilizing of polishing at an initial stage of polishing unstability of polishing immediately after initiation of polishing and difference of initial condition before polishing;
• detecting start judgment means for disabling polishing endpoint detecting operation until said first averaged data or said second averaged data is varied to a predetermined value or a predetermined multiple for adapting to fluctuation in signal fluctuation period in the initial stage of polishing due to fluctuation of polishing speed;
• first reference light amount detecting means and second reference light amount detecting means for detecting one of maximum values and averaged values of said first averaged data and said second averaged data during a period from polishing endpoint detection disabled condition by said initial variation canceling means to enabling of polishing endpoint detecting operation by said detection start judgment means to output as first reference light amount value and second reference light amount value;
• light amount ratio calculating means for calculating a ratio of said first averaged data and said second averaged data for outputting a light amount ratio data;
• first averaged gradient calculating means for calculating an averaged gradient between an averaged value of a plurality of retraced past data and a data at current measuring timing of said light amount ratio data and an averaged value of a plurality of past data of said light amount difference data;
• first threshold value calculating means for outputting a value derived by multiplying said first reference light amount value by a predetermined value as a first endpoint judgment threshold value for detecting polishing endpoint;
• and
• first polishing endpoint detecting means for comparing the value of said first averaged gradient data and said first endpoint judgment threshold value for making judgment of end of polishing of wafer when the value of said first averaged gradient data is greater than or equal to said first endpoint judgment threshold value continuously for a predetermined number of times, when the value of said first averaged gradient data is greater than or equal to said first endpoint judgment threshold value for a number of times greater than or equal to a given number of times in total after the absolute value of said first averaged gradient data becomes greater than or equal to a given value, or when a ratio that the value of said first averaged gradient data becomes greater than or equal to said first endpoint judgment threshold value is greater than or equal to a predetermined ratio.

A semiconductor wafer polishing endpoint detecting system comprising:

• a first laser light source as a light source for a first inspection light of a predetermined wavelength;
• a first irradiation means for irradiating said first inspection light on said wafer with a predetermined diameter and a predetermined angle;
• a second laser light source as a light source for a second inspection light of a wavelength different from that of said first inspection light;
• a second irradiation means for irradiating said second inspection light to the same irradiating position and the same diameter as said first inspection light at a predetermined angle;
• a first photodetector located on a regular reflection light axis of said first inspection light reflected on said wafer, receiving said regular reflection light for outputting a first light amount signal;
• a second photodetector located on a regular reflection light axis of said second inspection light reflected on said wafer, receiving said regular reflection light for outputting a second light amount signal;
• first averaging means and second averaging means for receiving said first light amount signal and said second light amount signal and averaging said first light amount signal and said second light amount signal per a period synchronous with an integer multiple of rotation period of said wafer in discrete manner for outputting a first averaged data and a second averaged data;
• initial variation canceling means for disabling polishing endpoint detecting operation from initiation of polishing to elapse of a predetermined period for preventing detection of signal variation before stabilizing of polishing at an initial stage of polishing unstability of polishing immediately after initiation of polishing and difference of initial condition before polishing;
• detecting start judgment means for disabling polishing endpoint detecting operation until one of said first averaged data or said second averaged data is varied to a predetermined value or a predetermined multiple for adapting to fluctuation in signal fluctuation period in the initial stage of polishing due to fluctuation of polishing speed;
• first reference light amount detecting means and second reference light amount detecting means for detecting one of maximum values and averaged values of said first averaged data and said second averaged data during a period from polishing endpoint detection disabled condition by said initial variation canceling means to enabling of polishing endpoint detecting operation by said detection start judgment means to output as first reference light amount value and second reference light amount value;
• first threshold value calculating means for outputting a value derived by multiplying said first reference light amount value by a predetermined value as a first endpoint judgment threshold value for detecting polishing endpoint second averaged gradient calculating means and third averaged gradient calculating means for calculating averaged gradients by connecting an averaged value of a plurality of retraced past data and the value at the current timing among the first averaged data and the second averaged data and an averaged data of a plurality of retraced past light amount difference data for outputting as a second averaged gradient data and a third averaged gradient data,
• first light amount increase detecting means and second light amount increase detecting means detecting the second averaged gradient data and the third averaged gradient data in positive value,
• second threshold value calculating means for outputting a value derived by multiplying the second reference light amount data output from the second reference light amount detecting means by a predetermined value as a second endpoint judgment threshold value for detecting the polishing endpoint on the side of the second inspection light, and
• second polishing endpoint detecting means and the third polishing endpoint detecting means for comparing the values of the second and third averaged gradient data and the endpoint judgment threshold value after the first light amount increase detecting means and the second light amount increase detection means detect the second averaged gradient data and the third averaged gradient data in positive for making judgment of end of polishing when the values of the second averaged gradient data and the third averaged gradient data become values greater than or equal to the endpoint judgment threshold values continuously for a predetermined number of times or more, when the second averaged gradient data and the third averaged gradient data become the value greater than or equal to the endpoint judgment threshold values for a number of times greater than or equal to the predetermined times in total after the absolute value of said averaged gradient data becomes greater than or equal to a given value, or when a ratio that the second averaged gradient data and the third averaged gradient data become greater than or equal to the endpoint judgment threshold value becomes greater than or equal to a predetermined ratio.

A semiconductor wafer polishing endpoint detecting system a comprising:

• multi-wavelength measurement means having a plurality of light sources respectively having different wavelength and one or more light receiving portion, irradiating a plurality of lights having different wavelengths on the same light axis as a sixth inspection light, receives a sixth regular reflection light as reflection light from the wafer to measure light receiving amount per wavelengths for outputting a plurality of received light amount signals;
• sixth irradiating means for guiding the sixth inspection light including a plurality of wavelengths emitted from the multi-wavelength measuring means for irradiating to the wafer at a predetermined diameter and a predetermined angle;
• sixth light receiving means for guiding the sixth regular reflection light reflected from the wafer to the multi-wavelength measuring means;
• first averaging means and second averaging means for receiving said first light amount signal and said second light amount signal and averaging said first light amount signal and said second light amount signal per a period synchronous with an integer multiple of rotation period of said wafer in discrete manner for outputting a first averaged data and a second averaged data;
• initial variation canceling means for disabling polishing endpoint detecting operation from initiation of polishing to elapse of a predetermined period for preventing detection of signal variation before stabilizing of polishing at an initial stage of polishing unstability of polishing immediately after initiation of polishing and difference of initial condition before polishing;
• detecting start judgment means for disabling polishing endpoint detecting operation until said first averaged data or said second averaged data is varied to a predetermined value or a predetermined multiple for adapting to fluctuation in signal fluctuation period in the initial stage of polishing due to fluctuation of polishing speed;
• first reference light amount detecting means and second reference light amount detecting means for detecting one of maximum values and averaged values of said first averaged data and said second averaged data during a period from polishing endpoint detection disabled condition by said initial variation canceling means to enabling of polishing endpoint detecting operation by said detection start judgment means to output as first reference light amount value and second reference light amount value;
• light amount correcting means for calculating a ratio of said first reference light amount value and said second reference light amount value and multiplying said second averaged data by said ratio of said first reference light amount value and said second reference light amount value for outputting a corrected light amount data;
• light amount difference calculating means for calculating a difference between said first averaged data and said corrected light amount data for outputting as a light amount difference data;
• first threshold value calculating means for outputting a value derived by multiplying said first reference light amount value by a predetermined value as a first endpoint judgment threshold value for detecting polishing endpoint;
• first averaged gradient calculating means for calculating an averaged gradient between an averaged value of a plurality of retraced past data and a data at current measuring timing of said light amount difference data and an averaged value of a plurality of past data of said light amount difference data;
• and
• first polishing endpoint detecting means for comparing the value of said first averaged gradient data and said first endpoint judgment threshold value for making judgment of end of polishing of wafer when the value of said first averaged gradient data is greater than or equal to said first endpoint judgment threshold value continuously for a predetermined number of times, when the value of said first averaged gradient data is greater than or equal to said first endpoint judgment threshold value for a number of times greater than or equal to a given number of times in total after the absolute value of said first averaged gradient data becomes greater than or equal to a given value, or when a ratio that the value of said first averaged gradient data becomes greater than or equal to said first endpoint judgment threshold value is greater than or equal to a predetermined ratio.

A semiconductor wafer polishing endpoint detecting method comprising the steps of:

• emitting a first inspection light of a predetermined wavelength;
• irradiating said first inspection light on said wafer with a predetermined diameter and a predetermined angle;
• emitting a second inspection light of a wavelength different from that of said first inspection light;
• irradiating said second inspection light to the same irradiating position and the same diameter as said first inspection light at a predetermined angle;
• receiving said regular reflection light of said first inspection light for outputting a first light amount signal;
• receiving said regular reflection light of said second inspection light for outputting a second light amount signal;
• receiving said first light amount signal and said second light amount signal and averaging said first light amount signal and said second light amount signal per a period synchronous with an integer multiple of rotation period of said wafer in discrete manner for outputting a first averaged data and a second averaged data;
• disabling polishing endpoint detecting operation from initiation of polishing to elapse of a predetermined period for preventing detection of signal variation before stabilizing of polishing at an initial stage of polishing unstability of polishing immediately after initiation of polishing and difference of initial condition before polishing;
• disabling polishing endpoint detecting operation until said first averaged data or said second averaged data is varied to a predetermined value or a predetermined multiple for adapting to fluctuation in signal fluctuation period in the initial stage of polishing due to fluctuation of polishing speed;
• detecting one of maximum values and averaged values of said first averaged data and said second averaged data during a period from polishing endpoint detection disabled condition by said initial variation canceling step to enabling of polishing endpoint detecting operation by said detection start judgment step to output as first reference light amount value and second reference light amount value;
• calculating a ratio of said first reference light amount value and said second reference light amount value and multiplying said second averaged data by said ratio of said first reference light amount value and said second reference light amount value for outputting a corrected light amount data;
• calculating a difference between said first averaged data and said corrected light amount data for outputting as a light amount difference data;
• outputting a value derived by multiplying said first reference light amount value by a predetermined value as a first endpoint judgment threshold value for detecting polishing endpoint;
• calculating an averaged gradient between an averaged value of a plurality of retraced past data and a data at current measuring timing of said light amount difference data and an averaged value of a plurality of past data of said light amount difference data;
• and
• comparing the value of said first averaged gradient data and said first endpoint judgment threshold value for making judgment of end of polishing of wafer when the value of said first averaged gradient data is greater than or equal to said first endpoint judgment threshold value continuously for a predetermined number of times, when the value of said first averaged gradient data is greater than or equal to said first endpoint judgment threshold value for a number of times greater than or equal to a given number of times in total after the absolute value of said first averaged gradient data becomes greater than or equal to a given value, or when a ratio that the value of said first averaged gradient data becomes greater than or equal to said first endpoint judgment threshold value is greater than or equal to a predetermined ratio.

A semiconductor wafer polishing endpoint detecting method comprising:

• emitting a first inspection light of a predetermined wavelength;
• irradiating said first inspection light on said wafer with a predetermined diameter and a predetermined angle;
• emitting a second inspection light of a wavelength different from that of said first inspection light;
• irradiating said second inspection light to the same irradiating position and the same diameter as said first inspection light at a predetermined angle;
• receiving said regular reflection light of said first inspection light for outputting a first light amount signal;
• receiving said regular reflection light of said second inspection light for outputting a second light amount signal;
• receiving said first light amount signal and said second light amount signal and averaging said first light amount signal and said second light amount signal per a period synchronous with an integer multiple of rotation period of said wafer in discrete manner for outputting a first averaged data and a second averaged data;
• disabling polishing endpoint detecting operation from initiation of polishing to elapse of a predetermined period for preventing detection of signal variation before stabilizing of polishing at an initial stage of polishing unstability of polishing immediately after initiation of polishing and difference of initial condition before polishing;
• disabling polishing endpoint detecting operation until said first averaged data or said second averaged data is varied to a predetermined value or a predetermined multiple for adapting to fluctuation in signal fluctuation period in the initial stage of polishing due to fluctuation of polishing speed;
• detecting one of maximum values and averaged values of said first averaged data and said second averaged data during a period from polishing endpoint detection disabled condition by said initial variation canceling means to enabling of polishing endpoint detecting operation by said detection start judgment means to output as first reference light amount value and second reference light amount value;
• calculating a ratio of said first averaged data and said second averaged data for outputting a light amount ratio data;
• calculating an averaged gradient between an averaged value of a plurality of retraced past data and a data at current measuring timing of said light amount ratio data and an averaged value of a plurality of past data of said light amount difference data;
• calculating a ratio of said first reference light amount value and said second reference light amount value and multiplying said second averaged data by said ratio of said first reference light amount value and said second reference light amount value for outputting a corrected light amount data;
• outputting a value derived by multiplying said first reference light amount value by a predetermined value as a first endpoint judgment threshold value for detecting polishing endpoint;
• and
• comparing the value of said first averaged gradient data and said first endpoint judgment threshold value for making judgment of end of polishing of wafer when the value of said first averaged gradient data is greater than or equal to said first endpoint judgment threshold value continuously for a predetermined number of times, when the value of said first averaged gradient data is greater than or equal to said first endpoint judgment threshold value for a number of times greater than or equal to a given number of times in total after the absolute value of said first averaged gradient data becomes greater than or equal to a given value, or when a ratio that the value of said first averaged gradient data becomes greater than or equal to said first endpoint judgment threshold value is greater than or equal to a predetermined ratio.

A semiconductor wafer polishing endpoint detecting method comprising of the steps:

• emitting a first inspection light of a predetermined wavelength;
• irradiating said first inspection light on said wafer with a predetermined diameter and a predetermined angle;
• emitting a second inspection light of a wavelength different from that of said first inspection light;
• irradiating said second inspection light to the same irradiating position and the same diameter as said first inspection light at a predetermined angle;
• receiving said regular reflection light of said first inspection light for outputting a first light amount signal;
• receiving said regular reflection light of said second inspection light for outputting a second light amount signal;
• receiving said first light amount signal and said second light amount signal and averaging said first light amount signal and said second light amount signal per a period synchronous with an integer multiple of rotation period of said wafer in discrete manner for outputting a first averaged data and a second averaged data;
• disabling polishing endpoint detecting operation from initiation of polishing to elapse of a predetermined period for preventing detection of signal variation before stabilizing of polishing at an initial stage of polishing unstability of polishing immediately after initiation of polishing and difference of initial condition before polishing;
• disabling polishing endpoint detecting operation until said first averaged data or said second averaged data is varied to a predetermined value or a predetermined multiple for adapting to fluctuation in signal fluctuation period in the initial stage of polishing due to fluctuation of polishing speed;
• detecting one of maximum values and averaged values of said first averaged data and said second averaged data during a period from polishing endpoint detection disabled condition by said initial variation canceling step to enabling of polishing endpoint detecting operation by said detection start judgment step to output as first reference light amount value and second reference light amount value;
• outputting a value derived by multiplying said first reference light amount value by a predetermined value as a first endpoint judgment threshold value for detecting polishing endpoint;
• calculating averaged gradients by connecting an averaged value of a plurality of retraced past data and the value at the current timing among the first averaged data and the second averaged data and an averaged data of a plurality of retraced past light amount difference data for outputting as a second averaged gradient data and a third averaged gradient data,
• detecting the second averaged gradient data and the third averaged gradient data in positive value,
• outputting a value derived by multiplying said first reference light amount by a predetermined value as a first endpoint judgment threshold value for detecting the polishing endpoint, and
• comparing the values of the second averaged gradient data and the third averaged gradient data and the endpoint judgment threshold value after the second averaged gradient data and the third averaged gradient data become positive values, for making judgment of end of polishing when the values of the second averaged gradient data and the third averaged gradient data become values greater than or equal to the endpoint judgment threshold value continuously for a predetermined number of times or more, when the second averaged gradient data and the third averaged gradient data become the value greater than or equal to the endpoint judgment threshold value for a number of times greater than or equal to the predetermined times in total the absolute value of said averaged gradient becomes greater than or equal to the predetermined value, or when a ratio that the second averaged gradient data and the third averaged gradient data become greater than or equal to the endpoint judgment threshold value is greater than or equal to a predetermined ratio.