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US 2001/0034072 A1Published application
Self-organized formation of quantum dots of a material on a substrate
AssigneeLockheed Martin Energy Research Corporation
InventorsZhenyu Zhang, John F. Wendelken, Ming-Che Chang, Woei Wu Pai
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Abstract
Systems and methods are described for fabricating arrays of quantum dots. A method for making a quantum dot device, includes: forming clusters of atoms on a substrate; and charging the clusters of atoms such that the clusters of atoms repel one another. The systems and methods provide advantages because the quantum dots can be ordered with regard to spacing and/or size.
Claims28
A method, comprising:
- forming clusters of atoms that are coupled to at least a portion of a substrate;
- and charging the clusters of atoms such that the clusters of atoms repel one another.
A quantum dot device made by a process, comprising:
- forming clusters of atoms coupled to at least a portion of a substrate;
- and
- charging the clusters of atoms such that the clusters of atoms repel one another.
Dependencies are inferred from the claim text.