Quartz window having reinforcing ribs
AssigneeTokyo Electron Limited
InventorMasayuki Kitamura
Life of this patent
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Abstract
A quartz window can withstand a pressure difference between an atmospheric pressure and a negative pressure environment created in a thermal processing apparatus that applies a thermal process to a target object under the negative pressure environment. The quartz window is adapted to be positioned between a radiation heat source and an object to be subjected to a heat treatment in the process chamber. The quartz window has a plate made of quartz and a plurality of ribs formed on the plate so as to reinforce the plate.
Claims18
A quartz window of a process chamber adapted to be positioned between a radiation heat source and an object to be subjected to a heat treatment in the process chamber, the quartz window comprising:
- a plate made of quartz;
- and
- a plurality of ribs formed on said plate so as to reinforce said plate.
A thermal processing apparatus comprising:
- a process chamber in which an object to be processed is placed;
- an exhaust part connected to said process chamber so as to evacuate gas inside said process chamber;
- radiation heat sources which apply heat to said object placed in said process chamber;
- and
- a quartz window situated between said radiation heat source and said object,
- wherein said quartz window has a plurality of ribs formed on a quartz plate so as to reinforce the quartz plate.
The thermal processing apparatus as claimed in claimed 16, wherein each of said extending parts has a groove which receives a respective one of said ribs of said of said quartz window.
Dependencies are inferred from the claim text.