Sic composite and method of production thereof
OwnerKichiya Tanino, Yasuhiro Akuneinventors
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OwnerKichiya Tanino, Yasuhiro Akuneinventors
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According to the present invention, SiC complex (M1) wherein a polycrystalline β-SiC layer (2) is grown on a surface of an a α-Sic sintered base material (1) by thermal chemical vapor deposition performed at a temperature in a range of 1,300 to 1,650° C., is subjected to heat treatment at a temperature in a range of 1,850 to 2,000° C., thereby converting an atomic arrangement of Si and C constituting a polycrystal of the polycrystalline β-SiC layer (2) into an atomic arrangement of the α-Sic sintered base material (1), so that a crystal structure in a boundary layer between the both (1) and (2) has continuity by a single crystal grain, thereby making it easy to work a reflecting mirror having a super smooth mirror surface, and ensuring the smoothness for a long time.
SiC complex in which a polycrystalline layer consisting of Si and C atoms is disposed on a surface of a SiC sintered base material by thermal chemical vapor deposition, characterized in that the SiC complex is subjected to heat treatment, thereby converting a part of or all atomic arrangement of Si and C constituting a polycrystal of the polycrystalline layer into an atomic arrangement of the SiC sintered base material, so that a crystal structure in a boundary layer between the both of the SiC sintered base material and the polycrystalline layer has continuity by a single crystal grain.
A method of producing SiC complex comprising the steps of:
Dependencies are inferred from the claim text.