Phase profilometry system with telecentric projector
AssigneeCyberOptics Corporation
InventorsDavid M. Kranz, Eric P. Rudd, David Fishbaine, Carl E. Haugan
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AssigneeCyberOptics Corporation
InventorsDavid M. Kranz, Eric P. Rudd, David Fishbaine, Carl E. Haugan
Estimating the term…
an optical system for computing a height of a target on a surface includes a light projector for projecting light. The light passes through a patterned reticle and a projector lens so as to illuminate the target with an image of the pattern. The light is projected telecentrically between the reticle and the projector lens, and a camera is positioned along a receive optical path. The camera receives an image of the target through a receive lens. The target and the pattern move at least three times with respect to each other, and the camera acquires an image of the object at each of at least three positions.
An optical system for computing a height of a target on a surface, the system comprising:
The system of claim I wherein the projector lens is astigmatic.
A method of computing height of a target on a surface comprising:
Dependencies are inferred from the claim text.