Semiconductor device testing apparatus and test method therefor
AssigneeAdvantest Corporation
InventorSaburo Uehara
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Abstract
The semiconductor device testing apparatus and the test method are disclosed whereby, after a pass value and fail value corresponding respectively to an upper limit and a lower limit of a test range have been set, measurement is not performed at these positions, but measurement is performed by means of a binary search method from the next position.
Claims5
A semiconductor device testing apparatus that detects a pass/fail threshold within a prescribed test range for a semiconductor device based on a binary search method, comprising:
- initial value setting unit for setting either an upper-limit value or a lower-limit value of said test range as a pass value, and the other limit value as a fail value;
- and
- device measuring unit for performing measurement by means of the binary search method on said semiconductor device with the said set pass value and said set fail value.
A semiconductor device test method for detecting a pass/fail threshold within a prescribed test range for a semiconductor device based on a binary search method, comprising:
- a first step of setting either an upper-limit value or a lower-limit value of said test range as a pass value and the other limit value as a fail value;
- a second step of setting a measurement position in accordance with the binary search method, using said pass value and said fail value;
- a third step of performing a prescribed measurement on said semiconductor device at said measurement position set in said second step;
- a fourth step of setting said measurement position set in said second step as said pass value if the measurement result obtained in said third step is a pass, or setting said measurement position set in said second step as said fail value if said measurement result is a fail;
- and
- a fifth step of calculating a difference between said pass value and said fail value after a processing in said fourth step is completed, and giving a command to repeat the processing from said second step onward until this difference is equal to or less than a measurement resolution.
Dependencies are inferred from the claim text.