Semiconductor device tester and method of testing semiconductor device
AssigneeNEC Corporation
InventorsMichinobu Tanioka, Takahiro Kimura, Hirobumi Inoue, Hiroo Ito, Yoshihito Fukasawa
Life of this patent
Estimating the term…
Loading patent…
AssigneeNEC Corporation
InventorsMichinobu Tanioka, Takahiro Kimura, Hirobumi Inoue, Hiroo Ito, Yoshihito Fukasawa
Estimating the term…
There is provided a semiconductor device tester including (a) a tester substrate having the same structure as a structure of a substrate as a product except that a semiconductor device is not mounted on the tester substrate, (b) an electrically conductive sheet covering therewith a first area in which the semiconductor device is to be mounted on the tester substrate, the electrically conductive sheet being electrically insulating in a certain direction, and (c) a holder supporting a semiconductor device to be tested therewith, and compressing the semiconductor device onto the electrically conductive sheet to thereby electrically connect an externally projecting terminal of the semiconductor device to a connection terminal mounted on the tester substrate in the first area.
A semiconductor device tester comprising:
A method of testing a semiconductor device, comprising the steps of:
Dependencies are inferred from the claim text.