US 2001/0032668 A1 · Apparatus and method for mixing gases

Abstract

Provided are apparatuses and methods for mixing gases. The apparatuses are suitable for use in the manufacture of an electronic device. The apparatuses include a gas mixing manifold. A first, bulk gas source is connected to introduce a flow of a first gas to the manifold. A second gas source is connected to introduce a flow of a second gas to the manifold. The first and second gases are mixed in the manifold, thereby forming a gas mixture. A conduit is connected to one or more point of use for introducing a flow of the gas mixture thereto. The present invention is particularly applicable in the semiconductor manufacturing industry.

Claims24

Dependent claims

An apparatus for mixing gases, suitable for use in the manufacture of an electronic device, comprising:

(a) a gas mixing manifold;
(b) a first, bulk gas source connected to introduce a flow of a first gas to the manifold;
(c) a second gas source connected to introduce a flow of a second gas to the manifold, wherein the first and second gases are mixed in the manifold, thereby forming a gas mixture;
and
(d) a conduit connected to one or more point of use for introducing a flow of the gas mixture thereto.

2 more elements

Dependencies are inferred from the claim text.

Facts

Application

09/764,424Filed 19 Jan 2001

Priority

4 Feb 2000

Published

25 Oct 2001

Term ends

Not estimatedThe source records don’t support an estimate.

Classification9 codes

G05D 11/138
By sensing at least one property of the mixture: by sensing the concentration of the mixture, e.g. measuring pH value
G05D 11/132
By measuring the values related to the quantity of the individual components: by controlling the flow of the individual components
Y10T 137/0329
With control of flow by a condition or characteristic of a fluid: mixing of plural fluids of diverse characteristics or conditions
Y10T 137/0363
With control of flow by a condition or characteristic of a fluid: for producing proportionate flow

Apparatus and method for mixing gases

Life of this patent

Apparatus and method for mixing gases

Life of this patent

Abstract

Claims24