Film forming apparatus and method of forming a crystalline silicon film
AssigneeNissin Electric Co., Ltd.
InventorsHiroya Kirimura, Kiyoshi Ogata
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Abstract
A film forming apparatus includes a silicon film forming vacuum chamber for forming a crystalline silicon film on a substrate; a film forming device provided for the vacuum chamber for forming a pre-film of the crystalline silicon film on a target surface of the substrate; and an energy beam irradiating device provided for the vacuum chamber for irradiating the pre-film with an energy beam for crystallizing the pre-film. This film forming apparatus produce a crystalline silicon film having a good quality as a semiconductor film for a TFT or the like with good productivity.
Claims32
A film forming apparatus comprising:
- a silicon film forming vacuum chamber for forming a crystalline silicon film on a substrate;
- a film forming device provided for said vacuum chamber for forming a pre-film of the crystalline silicon film on a target surface of said substrate;
- and
- an energy beam irradiating device provided for said vacuum chamber for irradiating said pre-film with an energy beam for crystallizing said pre-film.
A crystalline silicon film forming method comprising the steps of:
- preparing a film forming apparatus having a silicon film forming vacuum chamber for forming a crystalline silicon film on a substrate, and provided with a film forming device for forming a pre-film of the crystalline silicon film on a target surface of said substrate, and an energy beam irradiating device for irradiating said pre-film with an energy beam for crystallizing said pre-film;
- locating the substrate in said silicon film forming vacuum chamber, and forming the pre-film of the crystalline silicon film on the target surface of said substrate by said film forming device;
- and
- producing the intended crystalline silicon film from said pre-film by irradiating said pre-film in said vacuum chamber with said energy beam for crystallization of said pre-film emitted from said energy beam irradiating device subsequently to the formation of said pre-film.
Dependencies are inferred from the claim text.