Electrical contact method and apparatus in semiconductor device inspection equipment
AssigneeKabushiki Kaisha Nihon Micronics
InventorYoshiei Hasegawa
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Abstract
An electrical contact technique for use in the semiconductor device inspection equipment is disclosed. There are used one or more pyramid-shaped contactors projecting toward an objective semiconductor device to be tested. The contactor is brought into contact with the projection electrode of the objective semiconductor device through the edge line or the slant surface thereof. Accordingly, only the side portion of the projection electrode is pressed by the edge line or the slant surface of the contactor, thus the projection electrode being prevented from being damaged at the tip portion thereof.
Claims18
A method for bringing a contactor into electrical contact with a corresponding projection electrode of a semiconductor device in a semiconductor device inspection equipment, comprising the steps of preparing an electrical contact device having one or more pyramid-shaped contactors projecting toward said semiconductor device, and bringing the edge line or the slant surface of said contactor into contact with said corresponding projecting electrode.
An electrical contact apparatus for bringing a contactor into electrical contact with a corresponding projection electrode of a semiconductor device in a semiconductor device inspection equipment, comprising:
- a plate-like or filmy base, and one or more pyramid-shaped contactors provided in correspondence with said projection electrode and projecting out from the one surface of said base toward said semiconductor device,
- wherein said pyramid-shaped contactor is displaced in a predetermined direction in a plane parallel to said base with respect to said corresponding projection electrode.
An apparatus as claimed in claim wherein said base is provided with an opening which is formed in an area inside the arrangement area of said plural pyramid-shaped contactors and opened toward at least said corresponding projection electrode.
Dependencies are inferred from the claim text.