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AssigneeAgere Systems Inc.
InventorsJohn Eric Bower, John Z. Pastalan, George E. Rittenhouse
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A method for achieving improved piezoelectric films for use in a resonator device is disclosed. The method is based on applicant's recognition that the texture of a piezoelectric film (e.g., as used in a piezoelectric resonator) is directly affected by the surface morphology of the underlying electrode, and additionally, the surface morphology of the electrode is affected by the surface morphology of the underlying oxide layer or Bragg stack. Accordingly, the invention comprises a method of making a device having a piezoelectric film and electrode comprising controlling the deposition and surface roughness of the electrode and optionally, the Bragg stack.
A method for fabricating an electronic device having a piezoelectric material deposited on at least one metal layer, the method comprising depositing the at least one metal layer on a substrate and depositing the piezoelectric material on the metal layer, wherein the texture of the piezoelectric material is determined by controlling the surface roughness of the metal layer.
A method for fabricating a resonator device having a piezoelectric material deposited on at least one metal layer, the method comprising depositing the at least one metal layer on a Bragg stack deposited on a substrate so that the metal layer has a full-width half maximum rocking curve of less than about 4.5 degrees and depositing the piezoelectric material on the metal layer, whereby the texture of the piezoelectric material has a full-width half maximum rocking curve of less than about 3.5 degrees.
A method for fabricating a resonator device comprising the steps of:
Dependencies are inferred from the claim text.