Optical waveguide and method for making the same
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsToshiyuki Takizawa, Masahiro Kito
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Abstract
To provide an optical waveguide having an optical waveguide core enclosed with clads, which is independent of a polarization direction. In the optical waveguide, an optical waveguide core is enclosed with clads, and a sectional shape of the core in a direction crossing a light traveling direction is quasi-square, and a cross section of the core decreases from the light incoming end to the outgoing end in the light traveling direction.
Claims11
An optical waveguide having an optical waveguide core enclosed with clads,
- wherein a cross section of said core in a direction crossing a light traveling direction changes.
An optical waveguide having an optical waveguide core enclosed with clads,
- said optical waveguide comprising:
- a groove formed on a surface of a substrate so that a cross section of said core in a light traveling direction changes;
- and
- the core formed on said groove via the clad, whose cross section changes in the light traveling direction.
A method for making an optical waveguide having an optical waveguide core formed on a substrate, comprising the steps of:
- forming a mask with a band-shaped opening formed in a setting direction of the optical waveguide core on the substrate and changing the width of said opening in said setting direction;
- etching a surface of said substrate exposed to said opening by using said mask to form a groove whose depth varies in said setting direction;
- forming a clad material in said groove;
- stacking a core material made of light-propagable material from one end to the other end of said groove on said clad material;
- and
- etching said core material to form said core whose cross section decreases from one end to the other end of said groove in a light traveling direction.
A method for making an optical waveguide having an optical waveguide core formed on a substrate, comprising the steps of:
- forming a mask with a band-shaped opening formed in a setting direction of the optical waveguide core on the substrate and curving the shape of said opening from one end to the other end of said groove;
- etching a surface of said substrate exposed to said opening by using said mask to form a groove whose depth varies in said setting direction;
- forming a clad material in said groove;
- stacking a core material made of light-propagable material from one end to the other end of said groove on said clad material;
- and
- etching said core material to form said core whose cross section decreases from one end to the other end of said groove in a light traveling direction.
Dependencies are inferred from the claim text.