Electric Characteristic evaluating apparatus for a semiconductor device

An electric characteristic evaluating method for extracting electric characteristics of a semiconductor device by numerically solving physical equations describing physical phenomenon in a semiconductor device comprising the steps of:

• integrating a carrier generation and extinction speed obtained by numerically solving the physical equations, in each carrier generation and extinction mechanism within a semiconductor region;
• and
• issuing the result obtained by integration respectively.

An electric characteristic evaluating program for extracting electric characteristics of a semiconductor device by numerically solving physical equations describing physical phenomenon in a semiconductor device comprising and making a computer system execute the process of:

• an integral value calculating process of integrating a carrier generation and extinction speed obtained by numerically solving the physical equations, in each carrier generation and extinction mechanism within a semiconductor region, and issuing the result obtained by integration respectively.

A semiconductor device manufacturing method for extracting electric characteristics of a semiconductor device by numerically solving physical equations describing physical phenomenon in a semiconductor device, determining the manufacturing condition of semiconductor device from the extracted electric characteristics, and manufacturing the semiconductor device on the basis of the determined manufacturing condition comprising the steps of:

• integrating a carrier generation and extinction speed obtained by numerically solving the physical equations, in each carrier generation and extinction mechanism within a semiconductor region, and issuing the result obtained by integration respectively;
• and
• determining the manufacturing condition of the semiconductor device having the desired electric characteristics on the basis of the result obtained by integration.