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US 2001/0024700 A1Published application
Ruthenium-containing ultrasonically coated substrate for use in a capacitor and method of manufacture
OwnerAsbish Shah, Barry C. Muffolettoinventors
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Abstract
A deposition process for coating a substrate with an ultrasonically generated aerosol spray, is described. The resultant droplets are much smaller in size than those produced by conventional processes, thereby providing the present coating having an increased surface area. When the coated substrate is an electrode in a capacitor, a greater surface area results in an increased electrode capacitance. A preferred coating is of a ruthenium-containing oxide.
Claims38
A coated substrate, which comprises:
- a) a substrate of a conductive metal;
- and
- b) a coating of at least a ruthenium-containing compound provided on a surface of the substrate, wherein the coating is characterized as comprising particles having been formed from an ultrasonically generated aerosol of the ruthenium-containing compound dissolved in a solvent substantially devoid of alcohol contacted with the substrate.
A method for providing a coated substrate, comprising the steps of:
- a) providing the substrate having a surface to be coated;
- b) providing a solution comprised of a solvent substantially devoid of alcohol and having a ruthenium-containing compound dissolved therein;
- c) heating the substrate;
- d) subjecting the solution to ultrasonic sound waves thereby causing the solution to form into an aerosol;
- e) contacting the heated substrate with the aerosol thereby forming a coating of ultrasonically generated particles of the ruthenium-containing compound on the substrate, wherein the substrate is heated to a first temperature of at least about 100° C. and sufficient to at least partially evaporate the solvent from the substrate;
- and
- f) further heating the ultrasonically coated substrate to a second temperature of at least about 300° C. to cause the ruthenium-containing compound to completely form and adhere to the substrate.
4 more elements
A method for providing a coated substrate, comprising the steps of:
- a) providing the substrate having a surface to be coated;
- b) providing a solution comprised of a solvent substantially devoid of alcohol and having a ruthenium-containing oxide compound or a precursor thereof dissolved therein;
- c) heating the substrate to a first temperature of at least about 100° C.;
- d) subjecting the solution to ultrasonic sound waves, thereby causing the solution to form into an aerosol;
- e) contacting the heated substrate with the aerosol, thereby at least partially evaporating the solvent from the substrate and forming a coating of ultrasonically generated particles of the ruthenium-containing oxide or precursor thereof on the substrate;
- and
- f) further heating the ultrasonically coated substrate to a second temperature of at least about 300° C. to cause the ruthenium-containing oxide compound to completely form and adhere to the substrate or to convert the precursor thereof to the ruthenium-containing oxide compound adhered to the substrate.
4 more elements
A method for providing a coated substrate, comprising the steps of:
- a) providing the substrate having a surface to be coated;
- b) providing a solution comprised of a solvent substantially devoid of alcohol and having a ruthenium-containing oxide compound or a precursor thereof dissolved therein;
- c) heating the substrate to a first temperature of at least about 100° C.;
- d) subjecting the solution to ultrasonic sound waves, thereby causing the solution to form into an aerosol;
- e) contacting the heated substrate with the aerosol, thereby at least partially evaporating the solvent from the substrate and beginning forming a coating of ultrasonically generated particles on the substrate;
- and
- f) further heating the ultrasonically coated substrate to at least a second temperature of at least about 300° C. at a rate of about 1° C./minute to about 6° C./minute to cause the ruthenium-containing oxide compound to completely form and adhere to the substrate or to convert the precursor thereof to the ruthenium-containing oxide compound adhered to the substrate.
4 more elements
Dependencies are inferred from the claim text.