Film forming method and film forming apparatus as well as silicon-based film, photovoltaic device and solar cell, sensor and image pick-up device using the same
OwnerTakaharu Kondo, Masafumi Sano +2inventors
InventorsTakaharu Kondo, Masafumi Sano, Koichi Matsuda, Makoto Higashikawa
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Abstract
A film, typically a silicon-based film, is formed on a substrate by means of a plasma CVD process using a high frequency wave in a condition where a resistance element made of a different material than that of the substrate is provided on the electric path between the substrate and the earth. The resultant film shows a high quality and an improved adhesion strength while it can be formed at a practically high rate.
Claims50
A method of forming a film on a substrate by means of a plasma CVD process using a high frequency wave, said method comprising forming a resistance element made of a material different from that of said substrate and arranged on the electric path between said substrate and the earth for forming the film.
A silicon-based film formed on a substrate by means of a plasma CVD process using a high frequency wave, said silicon-based film being formed in the presence of a resistance element made of a material different from that of said substrate and arranged on the electric path between said substrate and the earth.
A photovoltaic device comprising at least a plurality of silicon-based semiconductor layers of mutually different conduction types formed on a substrate;
- at least one of said silicon-based semiconductor layers being formed by means of a plasma CVD process using a high frequency wave in the presence of a resistance element made of a material different from that of said substrate and arranged on the electric path between said substrate and the earth.
A film forming apparatus for forming a film on a substrate by means of a plasma CVD process using a high frequency wave;
- said film forming apparatus comprising a means for varying the insulation between said substrate and the earth.
Dependencies are inferred from the claim text.