US 2001/0023592 A1Published application

Cooling apparatus

AssigneeSeiko Instruments Inc.

InventorsAkikazu Odawara, Satoshi Nakayama, Atsushi Nagata

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Abstract

To provide cooling apparatus for cooling a workpiece or sensor down to the region of the melting point of helium where it is not necessary to pre-cool the inside of the apparatus using liquid nitrogen etc., and where the time and trouble involved in performing the cooling can be omitted. Rather than providing a storage tank for liquid helium within the vacuum chamber, a liquid helium introduction port is provided taking into consideration heat insulation. A liquid helium container and the port are then connected by vacuum heat insulating piping so that liquid helium is supplied directly from the container.

Claims5

Dependent claims

Cooling apparatus comprising:

a cooling head for cooling down to the region of the melting point of liquid gas;
a storage tank for storing liquid helium for cooling the cooling head;
a pump for transporting helium to the cooling head and exhausting the helium;
first piping connecting the storage tank and the cooling head;
second piping connecting the cooling head and the pump;
a vacuum chamber for providing heat insulation to external air for the cooling head, the storage tank, the first piping and at least part of the second piping;
a liquid helium container filled with liquid helium for transfer;
and
vacuum heat insulating piping for transferring liquid helium from the liquid helium container to the storage tank,
wherein the storage tank is not provided within the vacuum chamber, but instead there is provided a port for introducing liquid helium into the vacuum chamber.

7 more elements

Dependencies are inferred from the claim text.

Facts

Application: 09/780,840Filed 9 Feb 2001
Priority: JP 2000-03843516 Feb 2000
Published: 27 Sep 2001
Term ends: Not estimatedThe source records don’t support an estimate.

Classification14 codes

F17C 13/006
For medium-size and small storage vessels not under pressure: for Dewar vessels or cryostats
F17C 3/085
By vacuum spaces, e.g. Dewar flask: cryostats
F17C 3/10
With provision for thermal insulation: by liquid-circulating or vapour-circulating jackets
F17C 2203/0391
Thermal insulations: by vacuum

Family

US 6,474,079 B2Related patent
US 2001/0023592 A1This patent

From the US filing history. Foreign family members aren’t listed.

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