Back to results
US 2001/0019034 A1Published application
Parylene micro check valve and fabrication method thereof
AssigneeCalifornia Institute of Technology
InventorsYu-Chong Tai, Xuan-Qi Wang
Life of this patent
Estimating the term…
Abstract
The present disclosure describes a Parylene micro check valve including a micromachined silicon valve seat with a roughened top surface to which a membrane cap is anchored by twist-up tethers. The micro check valve is found to exhibit low cracking pressure, high reverse pressure, low reverse flow leakage, and negligible membrane-induced flow resistance when used as a valve over a micro orifice through which flow liquid and gas fluids.
Claims10
A method of forming a micro check valve comprising:
- etching a support substrate to form a valve seat having a top surface;
- forming an orifice in the support substrate dimensioned to direct flow of fluid out from the top surface of the valve seat;
- depositing a first polymer layer over the top surface of the valve seat covering said orifice;
- patterning the first polymer layer;
- depositing a second polymer layer over the patterned first polymer layer;
- and
- patterning the second polymer layer to form a deflectable membrane including a membrane cap anchored by a plurality of twist-up tethers, the membrane cap being vertically displaceable from the top surface in response to fluid flow through the orifice.
4 more elements
Dependencies are inferred from the claim text.