Synthesized silica glass optical member and method for manufacturing the same
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsJun Abe, Nobuyasu Mantoku, Shinji Makikawa, Seiki Ejima
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Abstract
A method for manufacturing a synthesized silica glass optical member, the method comprising: providing a porous silica glass body; heating the porous silica glass body in an atmosphere containing hydrogen or oxygen, and sintering the porous silica glass body in an atmosphere containing fluorine compound. Furthermore, a synthesized silica glass optical member manufactured by the method.
Claims18
A method for manufacturing a synthesized silica glass optical member, said method comprising:
- providing a porous silica glass body;
- heating the porous silica glass body in an atmosphere containing hydrogen;
- and
- sintering the porous silica glass body in an atmosphere containing a fluorine compound.
A method for manufacturing a synthesized silica glass optical member, said method comprising:
- providing a porous silica glass body;
- heating the porous silica glass body in an atmosphere containing oxygen;
- and
- sintering the porous silica glass body in an atmosphere containing a fluorine compound.
A method for a lithography using a photo mask, in which the photo mask utilizes a glass optical member, said method comprising:
- providing a porous silica glass body for the glass optical member;
- heating the porous silica glass body in an atmosphere containing hydrogen;
- and
- sintering the porous silica glass body in an atmosphere containing a fluorine compound.
A method for a lithography using a photo mask, in which the photo mask utilizes a glass optical member, said method comprising:
- providing a porous silica glass body for the glass optical member;
- heating the porous silica glass body in an atmosphere containing oxygen;
- and
- sintering the porous silica glass body in an atmosphere containing a fluorine compound.
Dependencies are inferred from the claim text.