Plasma treatment apparatus and method

A method of plasma treatment comprising the steps of;

• (a) opening a spacing between an upper electrode and a lower electrode in a vacuum chamber and supplying a workpiece to said lower electrode;
• (b) narrowing said spacing;
• (c) evacuating said vacuum chamber;
• (d) plasma treating said workpiece with plasma generated by applying a high-frequency voltage between said upper electrode and said lower electrode;
• (e) stopping generation of plasma and ventilating air in said vacuum chamber up to an atmospheric pressure;
• and
• (f) opening said spacing and transferring said workpiece from said vacuum chamber.

A plasma treatment apparatus comprising:

• (a) vacuum chamber;
• (b) an upper electrode and a lower electrode disposed in said vacuum chamber;
• and
• (c) a space-adjusting component for adjusting a spacing between said upper electrode and said lower electrode.