Gas friction pump
AssigneePfeiffer Vacuum GmbH
InventorsArmin Conrad, Heinrich Lotz
Life of this patent
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Abstract
A gas friction pump including a housing having a suction opening and an exhaust opening, main rotor and stator components arranged in the housing and cooperating with each other for delivering gases and for producing a pressure difference, and an auxiliary pumping unit provided at a side of the suction opening and having a gas delivery structure that provides for gas delivery in a radial direction, with the auxiliary pumping unit being formed of at least one stage and having auxiliary rotor and stator components, with the auxiliary rotor components being supported on the shaft which supports the main rotor components.
Claims9
A gas friction pump, comprising a housing having a suction opening and an exhaust opening;
- main rotor and stator components arranged in the housing and cooperating with each other for delivering gases and for producing a pressure difference;
- a shaft arranged in the housing for supporting the main rotor components;
- and an auxiliary pumping unit provided at a side of the suction opening and having a gas delivery structure that provides for gas delivery in a radial direction, the auxiliary pumping unit being formed of at least one stage and having auxiliary rotor and stator components, with the auxiliary rotor components being supported on the shaft which supports the main rotor components.
Dependencies are inferred from the claim text.