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US 2001/0017504 A1Published application
Piezoresonator
AssigneeInfineon Technologies AG
InventorsRobert Aigner, Stephan Marksteiner
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Abstract
A thin film piezoresonator, which can be tuned over a wide range of RF frequencies, includes a piezo layer between a first electrode layer and a second electrode layer. An electroactive layer of an electrostrictive material, which experiences a mechanical deformation when an electrical voltage is applied, is disposed between a third electrode layer and the second electrode layer.
Claims12
A thin film piezoresonator, comprising:
- a first electrode layer;
- a second electrode layer;
- a third electrode layer;
- a piezo layer disposed between said first and second electrode layers;
- and
- an electroactive layer disposed between said second and third electrode layers.
3 more elements
A thin film piezoresonator, comprising:
- a first electrode layer;
- a second electrode layer;
- a third electrode layer;
- a piezo layer disposed between said first and second electrode layers;
- and
- an electrostrictive layer disposed between said second and third electrode layers.
3 more elements
Dependencies are inferred from the claim text.