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US 2001/0017191 A1Published application
Apparatus for removing a coating film
AssigneeNEC Corporation
InventorsYoshiaki Hashimoto, Yasuyuki Sato
Life of this patent
Estimating the term…
Abstract
A slit type blow nozzle 14 for ejecting a blow gas 1 and a slit type chemical rinse nozzle 12 for ejecting a rinse chemical 2 are arranged such that the blow gas removes a coating film dissolved by the chemical rinse from the end surface of a glass substrate.
Claims13
An apparatus for removing a coating film comprising:
- a chemical rinse nozzle having an opening ejecting a chemical dissolving a coating film around the perimeter of an end surface of a substrate formed with the coating film;
- and a slit type blow nozzle having a slit opening ejecting gas to the substrate so as to remove the coating film dissolved by the chemical from the substrate.
Dependencies are inferred from the claim text.